CF Flanged SS Copper Bonnet Bellows Sealed Gate Valves (Pneumatic)
Introduction
CF Flanged Stainless Steel Copper Bonnet Bellows Sealed Gate Valves (Pneumatic) are designed for ultra-high vacuum (UHV) and high-vacuum systems where leak-tight isolation, clean operation, and long-term reliability are critical. Featuring a metal bellows seal and copper bonnet construction, these valves provide true zero-leak performance and are widely used in semiconductor processing, thin film deposition, accelerator systems, and advanced scientific research facilities.
Detailed Description
These pneumatic gate valves are constructed with a stainless steel valve body and CF (ConFlat) flanges, ensuring excellent mechanical strength, corrosion resistance, and compatibility with UHV environments. The bellows-sealed stem design completely isolates the process vacuum from the actuator mechanism, eliminating dynamic shaft seals and preventing virtual leaks or contamination.
The copper bonnet enhances thermal stability and vacuum integrity, especially in bake-out conditions. Knife-edge CF flanges combined with OFHC copper gaskets ensure reliable metal-to-metal sealing suitable for pressures down to the UHV range. Pneumatic actuation allows fast, repeatable valve operation and seamless integration with automated vacuum systems and interlock controls.
Valve internals are carefully finished to minimize particle generation and outgassing. The gate mechanism provides full conductance when open and tight isolation when closed, making it ideal for chamber isolation, load-lock systems, and beamline applications.
Applications
CF Flanged Bellows Sealed Pneumatic Gate Valves are commonly used in:
Ultra-high vacuum (UHV) and high-vacuum systems
Semiconductor fabrication and thin film deposition (PVD / CVD)
Load-lock and transfer chamber isolation
Particle accelerators and synchrotron beamlines
Surface science and analytical instruments
Research laboratories and vacuum test systems
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Valve Type | Gate Valve, Bellows Sealed | Ensures zero dynamic leakage |
| Actuation | Pneumatic (air-operated) | Enables automation and fast response |
| Body Material | Stainless Steel (304 / 316L) | Corrosion resistance & low outgassing |
| Bonnet Material | Copper | Improves vacuum sealing & bake-out stability |
| Flange Type | CF (ConFlat) | UHV-compatible metal sealing |
| Leak Rate | ≤ 1×10⁻¹⁰ mbar·L/s (typical) | Suitable for UHV systems |
| Operating Pressure | Atmosphere to UHV | Wide vacuum compatibility |
| Bake-Out Temperature | Up to 200 °C (typical) | Supports chamber bake-out |
Comparison with Other Valve Types
| Valve Type | Key Advantage | Typical Application |
|---|---|---|
| Bellows Sealed Gate Valve | True zero leakage, UHV compatible | Semiconductor & research UHV |
| Elastomer-Sealed Gate Valve | Lower cost | High / medium vacuum |
| Angle Valve | Compact flow control | Roughing & backing lines |
| Butterfly Valve | High conductance, simple design | Process isolation |
FAQ
| Question | Answer |
|---|---|
| Are these valves suitable for ultra-high vacuum? | Yes, CF flanges and bellows sealing make them suitable for UHV systems. |
| What gas is required for pneumatic actuation? | Clean, dry compressed air or nitrogen is recommended. |
| Can limit switches or position indicators be added? | Yes, optional open/close position indicators are available. |
| Are different CF sizes available? | Yes, common sizes include CF16 to CF160 and custom sizes on request. |
Packaging
Our CF Flanged SS Copper Bonnet Bellows Sealed Gate Valves (Pneumatic) are carefully cleaned, capped, and sealed to protect knife edges and internal surfaces. Each valve is securely packed in export-grade cartons or wooden crates to ensure safe delivery and immediate readiness for installation.
Conclusion
CF Flanged Stainless Steel Copper Bonnet Bellows Sealed Pneumatic Gate Valves provide a robust and reliable solution for critical vacuum isolation in UHV environments. With metal bellows sealing, pneumatic automation, and CF flange compatibility, these valves meet the demanding requirements of semiconductor manufacturing, thin film processing, and advanced scientific research.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Part Number |
| DN35CF-DN40CF (2.75" OD) | Copper | No | GU0150PCCFM |
| DN63CF (4.50" OD) | Copper | No | GU0250PCCFM |
| DN100CF (6.00" OD) | Copper | No | GU0400PCCFM |
| DN160CF (8.00" OD) | Copper | No | GU0600PCCFM |
| DN200CF (10.00" OD) | Copper | No | GU0800PCCFM |
Reviews
There are no reviews yet.