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Alloy Sputtering Targets

What Are Alloy Sputtering Targets?

An Alloy Sputtering Target is a material composed of two or more metal elements, designed for use in physical vapor deposition (PVD) and sputtering processes. These targets are bombarded with high-energy ions, causing atoms to be ejected and deposited as a thin film onto a substrate.

Unlike pure metal targets, alloy targets provide unique properties that enhance film characteristics such as electrical conductivity, corrosion resistance, hardness, and optical reflectivity. This makes them ideal for a wide range of functional and decorative coatings. 

Alloy Sputtering Targets offer several advantages over single-element Metal Targets:

  • Customizable Composition – Precisely engineered material properties for specific applications.
  • Enhanced Performance – Improved film adhesion, conductivity, and wear resistance.
  • Uniform Thin Films – Stable deposition rates for consistent coating quality.
  • Increased Durability – Reduced defects and longer operational life in sputtering systems.

Explore Our Alloy Sputtering Target Selection

Alloy Sputtering Targets (Planar & Rotary Type)

Full Name Short Name Purity (%) Action
Aluminum Copper Alloy Al-Cu 99.99/99.995
Aluminum Magnesium Alloy Al-Mg 99.99
Aluminum Magnesium Silicon Alloy Al-Mg-Si 99.99
Aluminum Neodymium Alloy Al-Nd 99.99
Aluminum Scandium Al-Sc 99.9
Aluminum Silicon Alloy Al-Si 99.99
Aluminum Silicon Copper Alloy Al-Si-Cu 99.99/99.995
Aluminum Titanium Alloy Al-Ti 99.99
Chromium Silicon Alloy Cr-Si 99.95
Cobalt Chromium Alloy Co-Cr 99.95/99.99
Cobalt Iron Alloy Co-Fe 99.95/99.99
Cobalt Iron Boron Alloy Co-Fe-B 99.95
Cobalt Iron Copper Alloy Co-Fe-Cu 99.95/99.99
Cobalt Nickel Alloy Co-Ni 99.95/99.99
Copper Aluminum Alloy Cu-Al 99.995/99.9995
Copper Cobalt Alloy Cu-Co 99.95/99.99
Copper Gallium Alloy Cu-Ga 99.99
Copper Indium Alloy Cu-In 99.99
Copper Indium Gallium Alloy Cu-In-Ga 99.99
Copper Manganese Alloy Cu-Mn 99.95/99.99
Copper Nickel Alloy Cu-Ni 99.95/99.99
Copper Silver  Cu-Ag 84:16 wt% 99.9
Copper Zinc  Cu-Zn 50-50 wt% 99.9
Copper Zirconium  Cu-Zr 99.95
Gold Copper  Au-Cu 99.9
Gold Palladium Au-Pd 99.9
Gold Tin  Au-Sn 99.9
Indium Antimony Alloy In-Sb 99.99
Indium Tin Alloy In-Sn 99.99
Iridium Manganese  Ir-Mn 99.9
Iron Aluminum  Fe-Al 99.9
Iron Cobalt Chromium Aluminum Alloy Fe-Co-Cr-Al 99.9
Iron Cobalt Nickel Chromium Copper Alloy Fe-Co-Ni-Cr-Cu 99.9
Iron Manganese Alloy Fe-Mn 99.95
Nickel Aluminum Alloy Ni-Al 99.995
Nickel Chromium Alloy Ni-Cr 99.9
Nickel Chromium Aluminum Silicon  Ni-Cr-Al-Si 99.9
Nickel Chromium Iron Alloy Ni-Cr-Fe 99.9
Nickel Chromium Silicon Alloy Ni-Cr-Si 99.995
Nickel Iron Alloy Ni-Fe 99.995
Permalloy  Ni-Fe-Mo-Mn 99.9
Nickel Molybdenum  Ni-Mo 99.9
Nickel Titanium  Ni-Ti 99.9
Nickel Manganese Alloy Ni-Mn 99.95
Nickel Vanadium Alloy Ni-V 99.995
Silicon Aluminum Alloy Si-Al 99.99
Silver Copper Alloy Ag-Cu 99.99
Silver Palladium  Ag-Pd 99.9
Titanium Aluminum Alloy Ti-Al 99.5
Titanium Aluminum Yttrium Alloy Ti-Al-Y 99.5
Titanium Nickel Alloy Ti-Ni 99.5
Titanium Silicon Alloy Ti-Si 99.5
Titanium Zirconium Alloy Ti-Zr 99.5
Tungsten Silicon Alloy W-Si 99.9
Tungsten Titanium Alloy W-Ti 99.9
Zinc Aluminum Alloy Zn-Al 99.99
Zinc Gallium Alloy Zn-Ga 99.99
Zinc Tin  Zn-Sn 52-48wt% 99.9
Zirconium Yttrium Alloy Zr-Y 99.5

Common Types of Alloy Sputtering Targets and Their Key Properties

At Thin Film Materials (TFM), we provide a wide variety of alloy sputtering targets with different compositions, including:

Binary Alloy Targets (Two-Metal Combinations)

  • Titanium-Aluminum (TiAl) – Ideal for hard coatings and aerospace applications.
  • Copper-Nickel (CuNi) – Used in corrosion-resistant coatings and electronic components.
  • Molybdenum-Tungsten (MoW) – Provides excellent thermal and wear resistance.
  • Nickel-Iron (NiFe, Permalloy) – Key material in magnetic storage devices.

Ternary & Quaternary Alloy Targets (Three or More Elements)

  • Aluminum-Chromium-Titanium (AlCrTi) – High-performance coating for cutting tools.
  • Indium-Tin Oxide (ITO) – Transparent conductive coatings for displays and touchscreens.
  • Chromium-Silicon-Titanium (CrSiTi) – Advanced coatings for optical and wear-resistant applications.

Custom Alloy Targets

We also offer custom alloy compositions based on your specific requirements. Whether you need a unique combination for R&D or a specialized industrial application, TFM can produce alloy sputtering targets tailored to your needs.

Applications of Alloy Sputtering Targets

Alloy Sputtering Targets are widely used in high-tech industries, including:

1. Semiconductor Industry

  • Thin-film transistors (TFTs)
  • Microelectronic circuits
  • Integrated circuits (ICs)

2. Optics & Display Technologies

  • Anti-reflective (AR) coatings
  • Low-emissivity (Low-E) glass coatings
  • Optical mirrors and filters

3. Renewable Energy

  • Photovoltaic (PV) solar cells
  • Thin-film batteries
  • Fuel cell coatings

4. Aerospace & Automotive

  • Wear-resistant coatings for components
  • Thermal barrier coatings (TBCs)
  • Decorative and functional coatings

5. Hard Coatings & Tooling

  • Titanium-based alloys for cutting tools
  • Scratch-resistant coatings for consumer electronics
  • Wear-resistant coatings for industrial machinery

Why Choose Thin Film Materials for Alloy Sputtering Targets?

When it comes to sputtering targets, quality and precision matter. At TFM, we provide:

Industry-Leading Purity – High-quality materials to achieve superior thin-film performance.
Custom Manufacturing – Tailored compositions to meet specific application needs.
Competitive Pricing – Cost-effective solutions without compromising quality.
Reliable Global Shipping – On-time delivery to support your production timelines.
Expert Technical Support – Assistance in material selection and process optimization.

 

Are you looking for high-quality alloy sputtering targets for your thin-film deposition processes? Thin Film Materials is your trusted partner for standard and custom-engineered sputtering materials.

📩 Contact Us Today for pricing, technical support, or custom orders. Our team is ready to help you find the perfect sputtering target for your application!

📞 Get in Touch | 📧 sales@thinfilmmaterials.com | 🌐 www.thinfilmmaterials.com

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