Ideal for upstream pressure regulation, CF Flanged SS 3-Position Pneumatic Gate Valves are frequently used alongside mass flow controllers for precise control in high-vacuum environments. The valve’s unique design includes a micrometer-set third position, enabling partial remote actuation to fine-tune the valve’s open position.
The valve body and internal components undergo vacuum furnace brazing at 1100°C and 10⁻⁶ torr, providing superior joint strength. This advanced process ensures that “virtual leaks” and entrapment areas are avoided, while also minimizing the structural distortion commonly seen in conventionally welded valves. For simplified maintenance, the carriage assembly can be removed without the need to disconnect the valve from the system.
Key Features:
- Electropolished stainless steel: Increases durability and resistance to corrosion.
- Compact interior surface area: One of the smallest in the vacuum valve industry, reducing contamination risks.
- Positive shut-off mechanism: Maintains a closed position even during power loss and pressure drops, ensuring safety.
- Innovative air cylinder design: Lacks mechanical locks inside the vacuum, minimizing shock and vibration during operation.
- Suitable for semiconductor and precision applications: Specifically engineered for sensitive processes.
These high-performance valves are available from TFM, providing a reliable solution for critical vacuum applications.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 7.501 x 10-10 Torr Max: 760 Torrmbar Min: 1.000 x 10-9 mbar Max: 1013 mbar |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator 60.0 ºC 140 ºFBakeable 150 ºC 302 ºF |
| Shaft Seal Material | Bellows Sealed |
| Cycle Life | 1,000,000 |
| Actuator Type | Pneumatic 3 Position |
| Solenoid Kit Included | Yes |
| Position Indicators | Yes |
| Max Differential Pressure Before Open | 22.5 Torr |
| Bonnet Seal Type | Fluorocarbon (FKM) |
| Valve Body Material | Stainless Steel |
| Valve Seal Material | Fluorocarbon (FKM) |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Part Number |
| ISO100-F (6.50" OD) | Fluorocarbon (FKM) | Yes | SGP0400IF |
| ISO100-K (5.12" OD) | Fluorocarbon (FKM) | Yes | SGP0400IK |
| ISO160-F (8.86" OD) | Fluorocarbon (FKM) | Yes | SGP0600IF |
| ISO160-K (7.09" OD) | Fluorocarbon (FKM) | Yes | SGP0600IK |
| ISO200-F (11.22" OD) | Fluorocarbon (FKM) | Yes | SGP0800IF |
| ISO200-K (9.45" OD) | Fluorocarbon (FKM) | Yes | SGP0800IK |
| ISO250-F (13.19" OD) | Fluorocarbon (FKM) | Yes | SGP1000IF |
| ISO250-K (11.42" OD) | Fluorocarbon (FKM) | Yes | SGP1000IK |
| ISO320-F (16.73" OD) | Fluorocarbon (FKM) | Yes | SGP1200IF |
| ISO320-K (14.57" OD) | Fluorocarbon (FKM) | Yes | SGP1200IK |
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