Overview of Valve Applications
Valves play a critical role in the semiconductor industry and other processing sectors, primarily used for isolating pumps and sample entry locks from high vacuum (HV) or ultra-high vacuum (UHV) work chambers.
Key Features
- Flange Compatibility: Designed to accommodate KF, ISO, and ASA/ANSI flanges, these valves function efficiently in atmospheric conditions down to the 10^-9 torr pressure range and are bakeable up to 150°C when in the open position.
- Premium Material: Constructed from electropolished stainless steel, these valves ensure superior durability and performance.
- Vacuum Brazing: The valves are vacuum brazed at 1,100°C, which guarantees reliable operation under HV and UHV conditions.
- Compact Design: Engineered for high conductance, the valves feature a compact design that optimizes space while maintaining performance.
- Smooth Operation: Designed for shock-free operation, they minimize vibration for enhanced stability during use.
- Longevity: With a service life of up to 100,000 cycles before maintenance is needed, these valves offer exceptional reliability and efficiency.
Explore how TFM’s innovative valve solutions can enhance your processing applications today!
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 7.501 x 10-10 Torr Max: 760 Torrmbar Min: 1.000 x 10-9 mbar Max: 1013 mbar |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator 60.0 ºC 140 ºFBakeable 150 ºC 302 ºF |
| Shaft Seal Material | Bellows Sealed |
| Cycle Life | 100,000 |
| Actuator Type | Manual |
| Max Differential Pressure Before Open | 22.5 Torr |
| Bonnet Seal Type | Fluorocarbon (FKM) |
| Valve Body Material | Stainless Steel |
| Valve Seal Material | Fluorocarbon (FKM) |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Thread | Part Number |
| KF16 (1.18" OD) | Fluorocarbon (FKM) | N/A | SG0063MVQF |
| KF40 (2.16" OD) | Fluorocarbon (FKM) | N/A | SG0150MVQF |
| KF50 (2.95" OD) | Fluorocarbon (FKM) | N/A | SG0200MVQF |
| ISO63-F (5.12" OD) | Fluorocarbon (FKM) | M8 | SG0250MVIF |
| ISO63-K (3.74" OD) | Fluorocarbon (FKM) | N/A | SG0250MVIK |
| ISO80-F (5.71" OD) | Fluorocarbon (FKM) | M8 | SG0300MVIF |
| ISO80-K (4.33" OD) | Fluorocarbon (FKM) | N/A | SG0300MVIK |
| ISO100-F (6.50" OD) | Fluorocarbon (FKM) | M8 | SG0400MVIF |
| ISO100-K (5.12" OD) | Fluorocarbon (FKM) | N/A | SG0400MVIK |
| ISO160-F (8.86" OD) | Fluorocarbon (FKM) | M10 | SG0600MVIF |
| ISO160-K (7.09" OD) | Fluorocarbon (FKM) | N/A | SG0600MVIK |
| ISO200-F (11.22" OD) | Fluorocarbon (FKM) | M10 | SG0800MVIF |
| ISO200-K (9.45" OD) | Fluorocarbon (FKM) | N/A | SG0800MVIK |
| ISO250-F (13.19" OD) | Fluorocarbon (FKM) | M10 | SG1000MVIF |
| ISO250-K (11.42" OD) | Fluorocarbon (FKM) | N/A | SG1000MVIK |
| ISO320-F (16.73" OD) | Fluorocarbon (FKM) | M12 | SG1200MVIF |
| ISO320-K (14.57" OD) | Fluorocarbon (FKM) | N/A | SG1200MVIK |
Reviews
There are no reviews yet.