Product Description: Valves designed for semiconductor and other processing applications, primarily used for isolating pumps and sample entry locks from HV or UHV work chambers.
Features:
- CF Flanged (with Copper Gasket): Operates in atmospheres up to 10⁻¹¹ torr, bakeable to 200°C (with actuator removed).
- Electropolished Stainless Steel: General purpose, vacuum brazed at 1,100°C for reliable HV/UHV performance.
- Compact Design: Ensures high conductance with shock-free, low-vibration operation.
- Long Service Life: 100,000-cycle operation before maintenance is required.
- Operation Options: Available in both manual and pneumatic models.
- Fail-Safe Pneumatic Valves: Automatically close or remain closed during power or air pressure loss.
- Advanced Pneumatics: 1.5″ flange O.D. and larger models come with magnetic REED switches for position indication.
- Solenoid Operator: Standard 120VAC solenoid (other voltages available on request). Note: Copper bonnet valves require external solenoid mounting due to the absence of bonnet plate mounting holes.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 7.501 x 10-11 Torr Max: 760 Torrmbar Min: 1.000 x 10-10 mbar Max: 1013 mbar |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator 60.0 ºC 140 ºFClosed Bake 150 ºC 302 ºFOpen Bake 200 ºC 392 ºF |
| Shaft Seal Material | Bellows Sealed |
| Cycle Life | 100,000 |
| Actuator Type | Pneumatic Double Acting |
| Solenoid Kit Included | No Yes |
| Max Differential Pressure Before Open | 22.5 Torr |
| Bonnet Seal Type | Copper |
| Valve Body Material | Stainless Steel |
| Valve Seal Material | Fluorocarbon (FKM) |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Note | Part Number |
| DN16CF (1.33" OD) | Copper | 1 | SG0063PCCF |
| DN16CF (1.33" OD) | Copper | — | SG0063PCCFM |
| DN35CF-DN40CF (2.75" OD) | Copper | — | SG0150PCCF |
| DN35CF-DN40CF (2.75" OD) | Copper | — | SG0150PCCFM |
| DN50CF (3.38" OD) | Copper | — | SG0200PCCF |
| DN50CF (3.38" OD) | Copper | — | SG0200PCCFM |
| DN63CF (4.50" OD) | Copper | — | SG0250PCCF |
| DN63CF (4.50" OD) | Copper | — | SG0250PCCFM |
| DN75CF (4.63" OD) | Copper | — | SG0300PCCF |
| DN75CF (4.63" OD) | Copper | — | SG0300PCCFM |
| DN100CF (6.00" OD) | Copper | — | SG0400PCCF |
| DN100CF (6.00" OD) | Copper | — | SG0400PCCFM |
| DN160CF (8.00" OD) | Copper | — | SG0600PCCF |
| DN160CF (8.00" OD) | Copper | — | SG0600PCCFM |
| DN200CF (10.00" OD) | Copper | — | SG0800PCCF |
| DN200CF (10.00" OD) | Copper | — | SG0800PCCFM |
| DN250CF (12.00" OD) | Copper | — | SG1000PCCF |
| DN250CF (12.00" OD) | Copper | — | SG1000PCCFM |
| DN275CF (13.25" OD) | Copper | — | SG1075PCCF |
| DN275CF (13.25" OD) | Copper | — | SG1075PCCFM |
| DN295CF (14.00" OD) | Copper | — | SG1200PCCF |
| DN295CF (14.00" OD) | Copper | — | SG1200PCCFM |
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