Introduction
CF Flanged Stainless Steel Bellows Sealed with Elastomer Bonnet Inline Valves (Manual) are precision isolation valves engineered for high-vacuum (HV) and ultra-high-vacuum (UHV) systems where leak integrity, clean operation, and manual control are essential. The bellows seal provides a true stem isolation from the vacuum, while the CF knife-edge flanges ensure reliable metal-to-metal sealing with copper gaskets.
Detailed Description
These manual inline valves feature a formed stainless steel bellows that completely isolates the stem mechanism from the vacuum environment, eliminating stem leakage and reducing contamination risks. The elastomer bonnet (commonly Viton®) protects the external mechanism and enables smooth, repeatable manual actuation while maintaining excellent sealing reliability within its temperature limits.
The valve body is manufactured from vacuum-grade stainless steel (typically 304 or 316L) with smooth internal flow paths to minimize particle generation and pressure drop. ConFlat® (CF) flanges with precision knife edges provide UHV-compatible connections and withstand repeated bakeout cycles when paired with OFHC copper gaskets.
Manual actuation offers fine control and mechanical simplicity, making these valves ideal for applications where automation is unnecessary or where tactile feedback is preferred.
Applications
UHV and HV pumping lines and isolation points
Thin film deposition systems (PVD, sputtering, evaporation)
Semiconductor process tools and load-locks
Surface science and analytical instruments
Research vacuum manifolds and test systems
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Valve Type | Inline, manual | Direct, precise control |
| Body Material | Stainless Steel 304 / 316L | Low outgassing, corrosion resistance |
| Stem Seal | Stainless steel bellows | Zero stem leakage |
| Bonnet Seal | Elastomer (e.g., Viton®) | Smooth operation, environmental protection |
| Flange Standard | ConFlat® (CF) | UHV metal sealing |
| Sizes | DN16CF – DN100CF (custom available) | System compatibility |
| Bakeout Temperature | Up to ~150–200 °C (bonnet-limited) | Defines operating window |
| Leak Rate | ≤ 1×10⁻¹⁰ mbar·L/s (typical) | Maintains vacuum integrity |
Comparison with Related Valves
| Valve Type | Key Advantage | Typical Application |
|---|---|---|
| CF Bellows Sealed, Elastomer Bonnet (Manual) | Zero stem leak, simple control | UHV isolation points |
| CF Bellows Sealed, Metal Bonnet | Higher bakeout capability | High-temperature UHV |
| ISO/KF Inline Valve | Faster assembly | General HV lines |
| Pneumatic Bellows Valve | Automated cycling | Process automation |
FAQ
| Question | Answer |
|---|---|
| What does the bellows seal provide? | Complete isolation of the stem from the vacuum, eliminating stem leaks. |
| Is this valve suitable for UHV systems? | Yes, CF flanges and bellows sealing are UHV compatible within bonnet limits. |
| Can the valve be baked? | Yes, typically up to ~150–200 °C depending on the elastomer bonnet. |
| Are different CF sizes available? | Yes, standard DN sizes and custom options are available. |
| How is cleanliness ensured? | Valves are cleaned and packaged for vacuum service prior to shipment. |
Packaging
Our CF Flanged Stainless Steel Bellows Sealed Inline Valves (Manual) are ultrasonically cleaned, capped on all CF knife edges, and individually packed. Protective foam and export-grade cartons or wooden crates ensure safe transportation and preserved cleanliness.
Conclusion
CF Flanged Stainless Steel Bellows Sealed with Elastomer Bonnet Inline Valves (Manual) provide dependable, leak-tight isolation for demanding HV and UHV applications. Combining proven bellows technology, CF metal sealing, and straightforward manual operation, they are a trusted solution for research, semiconductor, and advanced vacuum systems.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.
Ordering Table
| Drawing | Flange Size | Dim A | Dim B | Dim C | Dim D | Dim E | Part Number |
| DN16CF (1.33" OD) | 1.60 | 0.94 | 1.50 | 4.06 | 2.25 | SL0037MVCF |
|
| DN16CF (1.33" OD) | 1.60 | 1.00 | 1.62 | 4.19 | 2.25 | SL0050MVCF |
|
| DN16CF (1.33" OD) | 2.50 | 1.12 | 1.87 | 4.44 | 2.25 | SL0075MVCF |
|
| DN25CF (2.125" OD) | 2.05 | 1.37 | 2.25 | 4.69 | 2.25 | SL0100MVCF |
|
| DN35CF-DN40CF (2.75" OD) | 2.46 | 1.88 | 3.12 | 6.52 | 3.00 | SL0150MVCF |
|
| DN50CF (3.375" OD) | 3.48 | 2.62 | 4.12 | 8.73 | 3.50 | SL0200MVCF |
|
| DN63CF (4.50" OD) | 3.38 | 3.12 | 4.93 | 10.2 | 4.00 | SL0250MVCF |
|
| DN75CF (4.625" OD) | 3.53 | 3.68 | 5.62 | 11.04 | 4.50 | SL0300MVCF |
Accessories Table
CF Flanged Stainless Steel Bellows Sealed with Elastomer Bonnet Inline Valves (Manual) 2
| Type | Description | Part Number |
| OFHC Copper Gasket | GASKET, COPPER, DN16CF (1.33" OD) FLANGE, 0.837" OD, 0.640" ID, (10) PER PACKAGE | GA-0133 |
| OFHC Copper Gasket | GASKET, COPPER, DN35CF-DN40CF (2.75" OD) FLANGE, 1.895" OD, 1.450" ID, (10) PER PACKAGE | GA-0275 |
| OFHC Copper Gasket | GASKET, COPPER, DN50CF (3.375" OD) FLANGE, 2.425" OD, 2.010" ID, (10) PER PACKAGE | GA-0337 |
| OFHC Copper Gasket | GASKET, COPPER, DN63CF (4.50" OD) FLANGE, 3.241" OD, 2.506" ID, (10) PER PACKAGE | GA-0450 |
| OFHC Copper Gasket | GASKET, COPPER, DN75CF (4.625" OD) FLANGE, 3.598" OD X 3.010" ID, (10) PER PACKAGE | GA-0462 |
| OFHC Copper Gasket | GASKET, COPPER, DN25 (2.125" OD) FLANGE, 1.291" OD, 1.010" ID, (10) PER PACKAGE | GA-0212 |
| Bolt & Nut Set | SOCKET HEAD CAP SCREW, NUT & WASHER SET, STAINLESS STEEL, (25) 8-32 X 0.75" LONG SOCKET HEAD CAP SCREWS AND (25) HEX NUTS | SBS832075S4-25 |
| Bolt & Nut Set | HEX BOLT, NUT & WASHER SET, STAINLESS STEEL, (25) 5/16-24 X 1.75" LONG HEX BOLTS, (25) HEX NUTS, AND (50) FLAT WASHERS | HBS31224175 |
| Bolt & Nut Set | HEX BOLT, NUT & WASHER SET, STAINLESS STEEL, (25) 5/16-24 X 2.00" LONG HEX BOLTS, (25) HEX NUTS, AND (50) FLAT WASHERS | HBS31224200 |
| Bolt & Nut Set | HEX BOLT, NUT, & WASHER SET, STAINLESS STEEL, (25) 1/4-28 X 1.38" LONG HEX BOLTS, (25) HEX NUTS, AND (50) FLAT WASHERS | HBS25028138 |
| Anti-Seize Thread Lube | THREAD LUBRICANT, 4 OUNCE TUBE | VZTL-4OZ |
Reviews
There are no reviews yet.