Reliable and Economical Components for HV and UHV Applications
These valves are designed for high-vacuum (HV) and ultra-high-vacuum (UHV) applications where cleanliness and corrosion resistance are crucial. They offer a cost-effective solution for general-purpose use in demanding environments.
High Conductance Design
In the open position, the edge-welded bellows and valve seat move completely out of the gas path, enabling high conductance and smoother gas flow through the valve.
Key Features:
- Low Leak Rate: The leak rate across the valve seat is as low as 2×10⁻⁹ mbar L/s, ensuring excellent performance in vacuum-critical systems.
- Pressure Range:
- Maximum pressure: Atmospheric pressure
- Minimum pressure: 1×10⁻⁹ Torr
- Superior Sealing: Features fluorocarbon o-ring seat seals, bellows-sealed shafts, and bonnet seals. For higher temperature applications or better vacuum conditions, copper seals are available.
- Actuation Options: Valves are available in both manual and pneumatic configurations, providing flexibility to suit different system requirements.
- Easy Maintenance: Routine repairs can be carried out without removing the valve body from the system, reducing downtime and simplifying maintenance tasks.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 1.000 x 10-9 Torr Max: 760 Torrmbar 1.330 x 10-9 mbar atm 1.00 atm |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator 80.0 ºC 176 ºFClosed Bake 100 ºC 212 ºFOpen Bake 100 ºC 212 ºF |
| Actuator Type | Manual |
| Bonnet Seal Type | Viton |
| Valve Body Material | 304L SS |
| Valve Seal Material | Viton |
| Shaft Seal | Bellows |




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