Introduction
Pneumatic SS Y Inline Valves (ISO Flanged; Viton Bonnet) are high-reliability isolation valves designed for automated high-vacuum (HV) systems. Featuring a stainless steel Y-pattern body and ISO flanged connections, these valves deliver excellent conductance, fast actuation, and consistent sealing—ideal for semiconductor tools, coating systems, and industrial vacuum lines requiring repeatable, hands-free operation.
Detailed Description
These valves employ a Y-pattern inline geometry that minimizes flow restriction and turbulence, helping maintain stable pressures and efficient pump-down. ISO-K/ISO-F flanges enable quick integration with standardized HV piping, while the pneumatic actuator provides rapid, remote-controlled open/close cycling for process automation.
The Viton® bonnet seal ensures smooth stem motion and dependable sealing over repeated cycles, making this configuration well suited for HV environments where bakeout temperatures remain within Viton limits. Vacuum-grade stainless steel construction (typically 304 or 316L) offers low outgassing, corrosion resistance, and long service life. Precision machining and clean internal finishes reduce particle generation and enhance process cleanliness.
Applications
Automated HV pumping lines and manifolds
Thin film deposition systems (PVD, sputtering, evaporation)
Semiconductor process equipment and load-locks
Analytical instruments and R&D vacuum setups
Industrial vacuum furnaces and test rigs
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Body Material | Stainless Steel 304 / 316L | Low outgassing, corrosion resistance |
| Valve Type | Pneumatic Y-pattern inline | High conductance, fast isolation |
| Flange Standard | ISO-K / ISO-F (DN16 – DN160, custom) | Broad system compatibility |
| Bonnet Seal | Viton® | Reliable sealing, smooth operation |
| Actuation | Pneumatic (single or double acting) | Automation & repeatability |
| Leak Rate | ≤ 1×10⁻⁹ mbar·L/s (typical) | Maintains vacuum integrity |
| Bakeout Temperature | Up to ~150 °C (Viton-limited) | Defines thermal operating window |
Comparison with Related Valve Types
| Valve Type | Key Advantage | Typical Application |
|---|---|---|
| Pneumatic SS Y Inline Valve (ISO; Viton) | Automated control, excellent conductance | HV process lines |
| Manual SS Y Inline Valve | Simple, cost-effective | Manual isolation |
| Bellows-Sealed ISO Valve | Higher bakeout, zero stem leak | UHV & baked systems |
| KF Pneumatic Valve | Quick clamp convenience | Smaller HV lines |
FAQ
| Question | Answer |
|---|---|
| Is this valve suitable for UHV systems? | ISO flanges are HV-focused; UHV use depends on process and bakeout limits. |
| Can the valve be baked? | Yes, typically up to ~150 °C due to the Viton bonnet. |
| Are different ISO sizes available? | Yes, standard DN sizes are offered; custom sizes on request. |
| What control options are supported? | Pneumatic actuation with optional position indicators/solenoids. |
| How is cleanliness ensured? | Valves are cleaned and packed for vacuum service prior to shipment. |
Packaging
Our Pneumatic SS Y Inline Valves (ISO Flanged; Viton Bonnet) are ultrasonically cleaned, capped on sealing faces, and individually packed. Protective foam and export-grade cartons or wooden crates ensure damage-free delivery and preserved cleanliness.
Conclusion
Pneumatic SS Y Inline Valves (ISO Flanged; Viton Bonnet) provide dependable, automated isolation with excellent flow characteristics for modern HV systems. Their robust stainless steel construction, standardized ISO interfaces, and smooth pneumatic operation make them a reliable choice for semiconductor, coating, and industrial vacuum applications.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Part Number |
| ISO63-K (3.74" OD) | Viton | SY0250PVIK |
|
| ISO80-K (4.33" OD) | Viton | SY0300PVIK |
|
| ISO100-K (5.12" OD) | Viton | SY0400PVIK |
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