Bakeable Leak Valves Overview
Bakeable leak valves are designed to manage the flow of gas into a vacuum system from an external source. They utilize a soft metal pad compressed against a harder metal seat, ensuring a reliable seal for accurate gas flow control.
Typical Applications
- Argon processing
- Sputtering
- System purging
- Precision gas control
- Laser back-filling
Key Features
- Constructed from stainless steel, sapphire, and copper alloy for enhanced durability and longevity.
- Maximum inlet pressure of 34 bar.
- Operating pressure range from 1 bar to 10⁻¹¹ Torr.
- Offers an extremely precise control mechanism for accurate flow regulation.
- Capable of being baked out to 450°C in either an open or closed position.
- User-serviceable design for easy maintenance.
Specifications Table
Manufacturer | TFM |
---|---|
Pressure | Torr 1.000 x 10-10 Torr mbar 1.330 x 10-10 mbar atm 1.00 atm |
Rates | Controlled Leak Rate 1.330 x 10-9 mbar*L/s 1.000 x 10-9 Torr*L/s Max Flow 6.00 L/min |
Temperature | Bakeable 450 ºC 842 ºF |
Valve Body Material | 304L SS |
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