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Manual SS Sapphire-Sealed Variable Leak Valve (CF Flanged)

Manual SS Sapphire-Sealed Variable Leak Valve (CF Flanged) Description

TFM offers the Manual Stainless Steel Sapphire-Sealed Variable Leak Valve (CF Flanged), a precision-engineered vacuum component ideal for fine control of gas flow into ultra-high vacuum (UHV) and high vacuum (HV) systems. This valve is specially designed with a sapphire sealing element, ensuring exceptional leak tightness, excellent chemical resistance, and long-term stability under repeated use.

Unlike standard valves that rely on elastomer seals or needle-taper fittings, the sapphire-sealed construction delivers non-outgassing performance and precise, repeatable leak rates, even in plasma, semiconductor, or analytical instrumentation environments.

Key Features

  • Material: All-metal body in corrosion-resistant 304L or 316L stainless steel

  • Seal Type: Polished sapphire disc with metal-to-sapphire sealing mechanism

  • Flange Connection: CF (ConFlat®) flanges – available in DN16CF, DN40CF, and DN63CF

  • Pressure Range: Atmosphere to <10⁻⁹ Torr

  • Leak Rate: < 1×10⁻¹⁰ Torr·L/s (helium leak tested)

  • Valve Control: Micrometer-style manual adjustment for continuous leak-rate tuning

  • Temperature Range: Bakeable up to 200–250 °C (valve closed), depending on model

  • Flow Media: Inert gases, nitrogen, argon, helium, hydrogen, and process gases

  • Mounting Orientation: Vertical or horizontal

Advantages of Sapphire-Sealed Variable Leak Valves

  • Ultra-high vacuum compatibility with no organic materials or elastomers

  • Outstanding leak tightness even after numerous open/close cycles

  • Low outgassing for ultra-sensitive vacuum processes

  • High corrosion resistance in reactive or aggressive gas environments

  • Precise manual flow control down to molecular flow regime

  • Ideal for gas calibration, RGA backfill, or ion source feed-in

Applications

  • Thin film deposition systems (PVD/CVD)

  • UHV surface science chambers

  • Analytical instrumentation (e.g., mass spectrometry, RGA)

  • Leak testing systems and calibration setups

  • Semiconductor and photonics process lines

  • Controlled backfilling or venting of vacuum systems

Packaging and Quality Control

Each Manual Sapphire-Sealed Variable Leak Valve is helium leak tested and vacuum cleaned prior to shipment. Valves are packaged in cleanroom-compatible double-layer anti-static bags with product labels indicating flange size, leak rate class, material, and serial number.

Get Contact

TFM supplies sapphire-sealed variable leak valves with CF flanges in various configurations and sizes for research and industrial vacuum systems.
Contact us to request a quote or discuss custom designs compatible with your chamber layout.

Specifications Table

ManufacturerTFM
PressureTorr
1.000 x 10-10 Torr
mbar
1.330 x 10-10 mbar
atm
1.00 atm
RatesControlled Leak Rate
1.330 x 10-9 mbar*L/s
1.000 x 10-9 Torr*L/s
Max Flow
6.00 L/min
TemperatureBakeable
450 ºC
842 ºF
Valve Body
Material		304L SS

Ordering Table

Drawing Inlet Flange Size Outlet Flange Size Part Number
Tooltip DN16CF (1.33" OD) DN35CF-DN40CF (2.75" OD) AMLV1635CF

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FAQ

Tube fittings are designed for tubes (measured by outside diameter and wall thickness) used in high-pressure and instrumentation applications, whereas pipe fittings are for pipes (identified by nominal pipe size) primarily used in fluid transport.

 

Common valve types include ball valves, gate valves, check valves, butterfly valves, and globe valves. Each serves a specific function—from quick shutoff (ball/gate valves) to flow regulation (globe valves).

 

  • For tubing, measure the outside diameter; for pipes, refer to the nominal pipe size (using conversion charts if needed). Always match the valve or fitting size to your pipe’s dimensions and flow requirements.

  • Frequently used thread types include NPT (National Pipe Tapered), BSP (British Standard Pipe), and UNC, along with slip-fit options that rely on compression or fusion rather than threads.

Interchangeability depends on manufacturer specifications and certification. Always verify compatibility via manufacturer guides or certified interchangeability charts.

 

  • A coupling is a short, straight fitting used to join two pipes or tubes. It provides a secure, leak-tight connection and can sometimes serve to extend or repair piping runs.

Consider valve type, pressure and temperature ratings, material compatibility with your fluid, actuation method (manual or automatic), and maintenance requirements.

 

  • Valves regulate flow by opening, closing, or partially obstructing the pathway. Their mechanisms (such as the rotation of a ball or the linear movement of a gate) determine the speed and precision of flow control.

  • A flange is a flat, circular component used to connect pipes, valves, or other equipment. Bolted together with gaskets, flanges provide a secure, leak-proof joint that facilitates both assembly and maintenance.

  • Manual valves require physical operation via handles or levers, whereas actuated valves use mechanisms—pneumatic, electric, or hydraulic—to open and close automatically or remotely.

  • Issues include leaks caused by improper installation, over-tightening, degraded seals, material incompatibility, and fatigue from repeated cycling. Regular inspection and proper installation practices help mitigate these problems.

Regular maintenance involves periodic inspections, cleaning or replacing worn seals, ensuring proper torque during installation, and adhering to manufacturer guidelines and local plumbing codes to preserve system integrity.

 

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