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Exhaust Check Valves

Overview of Check Valves

These straightforward check valves are designed to inhibit air from entering a system after the rough pump is turned off. Commonly positioned on the exhaust side of the roughing pump, they effectively prevent the backflow of oil during pump shutdowns or failures. Depending on the installation requirements, these valves can utilize a gravity-sealed elastomer ball for vertical setups or a spring-loaded O-ring sealed disc that allows for installation in various orientations.

Key Features

  • Constructed from 316 stainless steel with FKM seals
  • Minimum relief pressure of 7 mbar
  • Leak rate specification of 1 × 10⁻⁵ mbar-L/sec
  • Recommended for scenarios where air influx might draw particulates into the system
  • Helps mitigate oil backflow from wet pumps
  • Operational temperature range: approximately -5°C to 100°C

Specifications Table

ManufacturerTFM
PressureTorr
7.500 x 10-5 Torr
mbar
1.000 x 10-4 mbar
RatesLeak Rate
1.000 x 10-5 mbar*L/s
7.520 x 10-6 Torr*L/s
Minimum Relief Pressure
7.00 mbar
5.25 Torr
TemperatureBakeable
100 ºC
212 ºF
Valve Body
Material		316L SS
Valve Seal
Material		Viton

Ordering Table

Drawing Flange Size Orientation Part Number
Tooltip KF40 (2.16" OD) Vertical CV0150BVQF
Tooltip KF40 (2.16" OD) Any CV0150SVQF

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FAQ

Sputtering targets are materials used in thin-film deposition processes to create coatings on substrates. They are used in industries like semiconductors, optics, photovoltaics, and electronics.

Evaporation materials are used in Physical Vapor Deposition (PVD) processes, where materials are heated and evaporated to form a thin film on a substrate. These are critical for applications in optics, wear protection, and decorative coatings.

Boat crucibles are used as containers for evaporation materials during PVD processes. They help to uniformly evaporate materials onto the substrate for thin film formation.

Sputtering uses energetic particles to eject material from a target, while evaporation involves heating a material until it vaporizes and deposits on a substrate. Both are common methods in Physical Vapor Deposition (PVD) for creating thin films.

Consider the material composition, purity, target size, and application-specific requirements such as the thickness and uniformity of the film.

Yes, we offer customized sputtering targets, evaporation materials, and crucibles to meet specific customer requirements for size, material composition, and purity.

Yes, we can assist in selecting the most suitable material based on your application, whether it’s for optical coatings, semiconductor fabrication, or decorative finishes.

Yes, we offer both bulk and small quantities of sputtering targets, evaporation materials, and spherical powders to support research, prototyping, and development projects.

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