Semiconductor Angle Valves
V41 Series Remote Plasma Control Valves
Unique triple shaft seal and grease counter flow protection provide enhanced low particle performance and long cycle life. Perfect for remote plasma cleaning applications or other processes where particle minimization is critical.
V44 Series Soft Start Valves
Soft-start angle and inline valves provide a smaller secondary port for initial pump down before the main valve opens. This feature reduces turbulence and particle generation in the vacuum system.
V42 Series Heated Angle Valve with Temperature Controller
Aluminum angled block valves with integrated heating are ideal for CVD applications, and other processes where removing cold zones and preventing condensation is critical. Available in standard configurations for ISO 25 to ISO 100 sizes. Customer sizes are also available.