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Weldable Tube 5-Way Crosses

Weldable Tube 5-Way Crosses for UHV Semiconductor Vacuum Systems

Weldable Tube 5-Way Crosses, fabricated by TFM, are precision-engineered for use in ultra-high vacuum (UHV) systems, particularly those found in semiconductor manufacturing environments. Constructed from high-grade 304 series stainless steel, these fittings offer exceptional cleanliness and mechanical performance for integration into foreline, pump exhaust, and roughing line infrastructure within subfab systems.

Each 5-way cross is meticulously manufactured using the pulled-port technique, ensuring full-penetration butt welds that eliminate internal crevices and reduce the risk of particle contamination. These weldable fittings are ideal for UHV conditions, offering vacuum compatibility down to 10⁻¹³ Torr, making them a critical component in systems requiring stringent vacuum integrity and purity.

The 5-way configuration provides five ports distributed across intersecting axes, enabling efficient routing and interconnection of multiple vacuum lines. Whether used for vacuum distribution hubs, gas manifolds, or instrumentation access, these crosses maximize layout flexibility while maintaining cleanliness and structural robustness.

Key Features of Weldable Tube 5-Way Crosses:

  • Material: Fabricated from 304 stainless steel for high strength and corrosion resistance in UHV systems.

  • Cleanroom-Ready: Designed for UHV performance with vacuum levels exceeding 10⁻¹³ Torr.

  • Precision Welding: Utilizes pulled-port fabrication and full-penetration welds for leak-tight integrity and mechanical durability.

  • Crevice-Free Joints: Engineered to eliminate contamination traps, supporting ultra-clean processes in sensitive semiconductor environments.

  • Wide Temperature Range: Operational from 200°C to +450°C, accommodating both cryogenic and high-temperature applications.

  • Reducer Crosses: Available to interconnect tubes of different sizes, providing system design flexibility.

  • Customizable Solutions: TFM offers a variety of standard wall thicknesses and tube diameters, and we welcome custom designs and flanged variants tailored to your project.

Typical Applications:

  • Semiconductor process tool vacuum plumbing

  • Subfab pump exhaust and roughing lines

  • UHV gas distribution and metrology

  • Cryogenic or heated vacuum routing systems

  • R&D and university cleanroom infrastructure

TFM’s Weldable Tube 5-Way Crosses combine rugged construction with ultra-clean performance, offering the reliability and adaptability essential for modern vacuum system architecture.

For custom dimensions, drawings, or material compatibility questions, contact the TFM engineering team.

Ordering Table

Drawing WallThickness DimA TubeOD Part Number
Tooltip 0.07 1 0.75 G-10W-075
Tooltip 0.07 1.88 1 G-10W-100
Tooltip 0.12 9.5 10 G-10W-1000
Tooltip 0.07 2.25 1.5 G-10W-150
Tooltip 0.07 3 2 G-10W-200
Tooltip 0.07 3 2.5 G-10W-250
Tooltip 0.07 3.75 2.5 G-10W-250V
Tooltip 0.07 3.25 3 G-10W-300
Tooltip 0.08 3.88 4 G-10W-400
Tooltip 0.08 4.87 4 G-10W-400V
Tooltip 0.08 4.25 5 G-10W-500
Tooltip 0.08 5 6 G-10W-600
Tooltip 0.08 6.06 6 G-10W-600V

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FAQ

Tube fittings are designed for tubes (measured by outside diameter and wall thickness) used in high-pressure and instrumentation applications, whereas pipe fittings are for pipes (identified by nominal pipe size) primarily used in fluid transport.

 

Common valve types include ball valves, gate valves, check valves, butterfly valves, and globe valves. Each serves a specific function—from quick shutoff (ball/gate valves) to flow regulation (globe valves).

 
  • For tubing, measure the outside diameter; for pipes, refer to the nominal pipe size (using conversion charts if needed). Always match the valve or fitting size to your pipe’s dimensions and flow requirements.

  • Frequently used thread types include NPT (National Pipe Tapered), BSP (British Standard Pipe), and UNC, along with slip-fit options that rely on compression or fusion rather than threads.

Interchangeability depends on manufacturer specifications and certification. Always verify compatibility via manufacturer guides or certified interchangeability charts.

 
  • A coupling is a short, straight fitting used to join two pipes or tubes. It provides a secure, leak-tight connection and can sometimes serve to extend or repair piping runs.

Consider valve type, pressure and temperature ratings, material compatibility with your fluid, actuation method (manual or automatic), and maintenance requirements.

 
  • Valves regulate flow by opening, closing, or partially obstructing the pathway. Their mechanisms (such as the rotation of a ball or the linear movement of a gate) determine the speed and precision of flow control.

  • A flange is a flat, circular component used to connect pipes, valves, or other equipment. Bolted together with gaskets, flanges provide a secure, leak-proof joint that facilitates both assembly and maintenance.

  • Manual valves require physical operation via handles or levers, whereas actuated valves use mechanisms—pneumatic, electric, or hydraulic—to open and close automatically or remotely.

  • Issues include leaks caused by improper installation, over-tightening, degraded seals, material incompatibility, and fatigue from repeated cycling. Regular inspection and proper installation practices help mitigate these problems.

Regular maintenance involves periodic inspections, cleaning or replacing worn seals, ensuring proper torque during installation, and adhering to manufacturer guidelines and local plumbing codes to preserve system integrity.

 

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