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CF Flanged Quartz (Fused Silica) Viewports

CF Flanged Quartz (Fused Silica) Viewports for UHV Optical Applications

CF Flanged Quartz (Fused Silica) Viewports by TFM are engineered for ultra-high vacuum (UHV) systems that demand high-transmission optical access while maintaining exceptional vacuum integrity. These viewports are built with fused silica (quartz) lenses mounted inside CF (ConFlat®) flanges, ensuring superior performance across a wide range of optical and environmental conditions.

The quartz lens provides broad spectral transmission, typically ranging from 200 nm (deep UV) to over 2.5 µm (near-IR), making these viewports ideal for use in laser systems, spectroscopy, visual inspection, and plasma diagnostics. Fused silica also offers low thermal expansion and chemical resistance, ensuring long-term durability in aggressive environments.

Each CF Flanged Quartz (Fused Silica) Viewport is sealed using fully annealed copper gaskets, allowing knife-edge flanges to form leak-tight, metal-to-metal UHV seals. This sealing method supports vacuum pressures as low as 10⁻¹⁰ Torr, and the entire assembly is bakeable to 250°C, enabling thorough outgassing and cleaning.

When installed in deposition systems (e.g., PVD, CVD, sputtering), it’s highly recommended to use a viewport shutter to prevent optical degradation from coating buildup on the quartz surface.

Key Features of CF Flanged Quartz (Fused Silica) Viewports:

  • UHV Compatibility: Suitable for ultra-high vacuum systems down to 10⁻¹⁰ Torr.

  • Broad Wavelength Range: Excellent transmission from 200 nm to 2500 nm, ideal for UV, visible, and IR applications.

  • Durable Construction: Quartz lens paired with 304L stainless steel CF flanges for corrosion and thermal resistance.

  • Metal Seal Reliability: Uses annealed copper gaskets for robust, vacuum-tight metal sealing.

  • High-Temperature Bakeability: Viewports are stable for bakeout procedures up to 250°C.

Recommended Applications:

  • Laser optics ports in vacuum chambers

  • UHV inspection and optical diagnostic access

  • Photonic research setups requiring quartz windows

  • Deposition systems with in-situ optical monitoring

TFM’s CF Flanged Quartz (Fused Silica) Viewports are trusted in industries ranging from semiconductor fabrication to materials science research. They provide the ideal balance between optical precision, thermal resilience, and UHV sealing, ensuring long-lasting performance in the most demanding vacuum environments.

Charts

Ordering Table

Drawing Flange / Mounting Window Material Wavelength Optimization Reflection (avg) View Area Window Thickness Flange Material Sleeve Material PartNumber
Tooltip DN16CF (1.33" OD) Corning HPFS 7980 Fused Silica — — 0.63 0.085 304L SS 304L SS VPZL-133DU
Tooltip DN35CF-DN40CF (2.75" OD) Corning HPFS 7980 Fused Silica — — 1.40 0.125 304L SS 304L SS VPZL-275DU
Tooltip DN50CF (3.38" OD) Corning HPFS 7980 Fused Silica — — 1.40 0.125 304L SS 304L SS VPZL-337DU
Tooltip DN63CF (4.50" OD) Corning HPFS 7980 Fused Silica — — 2.69 0.250 304L SS 304L SS VPZL-450DU
Tooltip DN75CF (4.63" OD) Corning HPFS 7980 Fused Silica — — 2.69 0.250 304L SS 304L SS VPZL-463DU
Tooltip DN100CF (6.00" OD) Corning HPFS 7980 Fused Silica — — 3.88 0.250 304L SS 304L SS VPZL-600DU
Tooltip DN35CF-DN40CF (2.75" OD) Corning HPFS 7980 Fused Silica Excimer Grade 193 — — 1.40 0.125 304L SS 304L SS VPZL-275EU
Tooltip DN63CF (4.50" OD) Corning HPFS 7980 Fused Silica Excimer Grade 193 — — 2.69 0.250 304L SS 304L SS VPZL-450EU
Tooltip DN16CF (1.33" OD) Corning HPFS 7980 Fused Silica — — 0.63 0.085 304L SS 304L SS VPZL-133Q
Tooltip DN35CF-DN40CF (2.75" OD) Corning HPFS 7980 Fused Silica — — 1.40 0.125 304L SS 304L SS VPZL-275Q
Tooltip DN50CF (3.38" OD) Corning HPFS 7980 Fused Silica — — 1.40 0.125 304L SS 304L SS VPZL-337Q
Tooltip DN63CF (4.50" OD) Corning HPFS 7980 Fused Silica — — 2.69 0.250 304L SS 304L SS VPZL-450Q
Tooltip DN75CF (4.63" OD) Corning HPFS 7980 Fused Silica — — 2.69 0.250 304L SS 304L SS VPZL-463Q
Tooltip DN100CF (6.00" OD) Corning HPFS 7980 Fused Silica — — 3.88 0.250 304L SS 304L SS VPZL-600Q
Tooltip DN125CF (6.75" OD) Corning HPFS 7980 Fused Silica — — 3.88 0.250 304L SS 304L SS VPZL-675Q
Tooltip DN160CF (8.00" OD) Corning HPFS 7980 Fused Silica — — 5.38 0.375 304L SS 304L SS VPZL-800Q
Tooltip DN200CF (10.00" OD) Corning HPFS 7980 Fused Silica — — 7.78 0.375 304L SS 304L SS VPZL-1000Q
Tooltip DN16CF (1.33" OD) Corning HPFS 7980 Fused Silica 550-1100nm <0.75% Per Surface 0.63 0.085 304L SS 304L SS VPZL-133DUC3
Tooltip DN16CF (1.33" OD) Corning HPFS 7980 Fused Silica Excimer Grade 248 225-450nm <1.5% Per Surface 0.63 0.085 304L SS 304L SS VPZL-133EUC1
Tooltip DN35CF-DN40CF (2.75" OD) Corning HPFS 7980 Fused Silica Excimer Grade 248 225-450nm <1.5% Per Surface 1.40 0.125 304L SS 304L SS VPZL-275EUC1
Tooltip DN35CF-DN40CF (2.75" OD) Corning HPFS 7980 Fused Silica 425-760nm <0.5% Per Surface 1.40 0.125 304L SS 304L SS VPZL-275DUC2
Tooltip DN35CF-DN40CF (2.75" OD) Corning HPFS 7980 Fused Silica 550-1100nm <0.75% Per Surface 1.40 0.125 304L SS 304L SS VPZL-275DUC3
Tooltip DN63CF (4.50" OD) Corning HPFS 7980 Fused Silica Excimer Grade 248 225-450nm <1.5% Per Surface 2.69 0.250 304L SS 304L SS VPZL-450EUC1
Tooltip DN63CF (4.50" OD) Corning HPFS 7980 Fused Silica 425-760nm <0.5% Per Surface 2.69 0.250 304L SS 304L SS VPZL-450DUC2
Tooltip DN63CF (4.50" OD) Corning HPFS 7980 Fused Silica 550-1100nm <0.75% Per Surface 2.69 0.250 304L SS 304L SS VPZL-450DUC3
Tooltip DN100CF (6.00" OD) Corning HPFS 7980 Fused Silica 425-760nm <0.5% Per Surface 3.88 0.250 304L SS 304L SS VPZL-600DUC2
Tooltip DN100CF (6.00" OD) Corning HPFS 7980 Fused Silica 550-1100nm <0.75% Per Surface 3.88 0.250 304L SS 304L SS VPZL-600DUC3

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FAQ

Tube fittings are designed for tubes (measured by outside diameter and wall thickness) used in high-pressure and instrumentation applications, whereas pipe fittings are for pipes (identified by nominal pipe size) primarily used in fluid transport.

 

Common valve types include ball valves, gate valves, check valves, butterfly valves, and globe valves. Each serves a specific function—from quick shutoff (ball/gate valves) to flow regulation (globe valves).

 

  • For tubing, measure the outside diameter; for pipes, refer to the nominal pipe size (using conversion charts if needed). Always match the valve or fitting size to your pipe’s dimensions and flow requirements.

  • Frequently used thread types include NPT (National Pipe Tapered), BSP (British Standard Pipe), and UNC, along with slip-fit options that rely on compression or fusion rather than threads.

Interchangeability depends on manufacturer specifications and certification. Always verify compatibility via manufacturer guides or certified interchangeability charts.

 

  • A coupling is a short, straight fitting used to join two pipes or tubes. It provides a secure, leak-tight connection and can sometimes serve to extend or repair piping runs.

Consider valve type, pressure and temperature ratings, material compatibility with your fluid, actuation method (manual or automatic), and maintenance requirements.

 

  • Valves regulate flow by opening, closing, or partially obstructing the pathway. Their mechanisms (such as the rotation of a ball or the linear movement of a gate) determine the speed and precision of flow control.

  • A flange is a flat, circular component used to connect pipes, valves, or other equipment. Bolted together with gaskets, flanges provide a secure, leak-proof joint that facilitates both assembly and maintenance.

  • Manual valves require physical operation via handles or levers, whereas actuated valves use mechanisms—pneumatic, electric, or hydraulic—to open and close automatically or remotely.

  • Issues include leaks caused by improper installation, over-tightening, degraded seals, material incompatibility, and fatigue from repeated cycling. Regular inspection and proper installation practices help mitigate these problems.

Regular maintenance involves periodic inspections, cleaning or replacing worn seals, ensuring proper torque during installation, and adhering to manufacturer guidelines and local plumbing codes to preserve system integrity.

 

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