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Perfluoroelastomer (FFKM) Kalrez® O-rings (0.040-0.070 Section)

Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.040–0.070 Section): Micro-Scale Sealing for High-Purity Plasma and Chemical Applications

Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.040–0.070 section) from TFM are engineered for ultra-compact sealing in high-temperature and high-purity environments such as semiconductor processing, plasma chambers, and chemical analysis systems. Fabricated using Kalrez® 4079, these O-rings deliver unmatched resistance to aggressive chemicals, reactive gases, and harsh vacuum conditions while operating at continuous temperatures up to 316°C.

The 0.040–0.070 inch cross-sectional range is ideal for ultra-fine sealing points where space is extremely limited but failure is not an option. These O-rings maintain their form and sealing properties through thermal cycling, ensuring stable performance in CVD, etching, and gas delivery systems.

Product Specifications:

  • Material: Kalrez® 4079 (Perfluoroelastomer, FFKM)

  • Color: Black

  • Durometer: 75 Shore A

  • Cross-Section Range: 0.040″ to 0.070″

  • Temperature Range: –19°C to +316°C (continuous), short-term excursions above this limit

Key Benefits:

  • Exceptional chemical resistance to acids, bases, solvents, and plasma environments

  • Minimal outgassing and weight loss, ideal for UHV and cleanroom systems

  • Low compression set, even after prolonged high-temperature exposure

  • Precision sealing for micro instrumentation and gas lines

  • Compatible with dry and wet semiconductor processing environments

Limitations:

  • Not recommended for use with hot water or steam

  • Avoid contact with hot aliphatic amines, ethylene oxide, and propylene oxide

Typical Applications:

  • Micro-sealing in plasma etchers, ALD/CVD tools, and semiconductor subassemblies

  • High-purity gas distribution modules and pressure regulators

  • Miniature UHV systems, analytical instruments, and chemical containment

  • Valve seats and O-ring glands in confined high-temperature areas

TFM’s Kalrez® FFKM O-Rings (0.040–0.070 section) offer the highest performance available for micro-sealing tasks where chemical purity, thermal endurance, and dimensional precision are critical to system integrity.

Ordering Table 

Drawing Reference O-Ring Size O-Ring Material O-Ring OD O-Ring ID O-Ring Cross Section O-Ring Color Part Number
Tooltip O-ring Seals, Kalrez 001 4079 Kalrez 0.109 0.029 0.040 Black O-K001
Tooltip O-ring Seals, Kalrez 002 4079 Kalrez 0.142 0.042 0.050 Black O-K002
Tooltip O-ring Seals, Kalrez 003 4079 Kalrez 0.176 0.056 0.060 Black O-K003
Tooltip O-ring Seals, Kalrez 004 4079 Kalrez 0.210 0.070 0.070 Black O-K004
Tooltip O-ring Seals, Kalrez 005 4079 Kalrez 0.241 0.101 0.070 Black O-K005
Tooltip O-ring Seals, Kalrez 006 4079 Kalrez 0.254 0.114 0.070 Black O-K006
Tooltip O-ring Seals, Kalrez 007 4079 Kalrez 0.285 0.145 0.070 Black O-K007
Tooltip O-ring Seals, Kalrez 008 4079 Kalrez 0.316 0.176 0.070 Black O-K008
Tooltip O-ring Seals, Kalrez 009 4079 Kalrez 0.348 0.208 0.070 Black O-K009
Tooltip O-ring Seals, Kalrez 010 4079 Kalrez 0.379 0.239 0.070 Black O-K010
Tooltip O-ring Seals, Kalrez 011 4079 Kalrez 0.441 0.301 0.070 Black O-K011
Tooltip O-ring Seals, Kalrez 012 4079 Kalrez 0.504 0.364 0.070 Black O-K012
Tooltip O-ring Seals, Kalrez 013 4079 Kalrez 0.566 0.426 0.070 Black O-K013
Tooltip O-ring Seals, Kalrez 014 4079 Kalrez 0.629 0.489 0.070 Black O-K014
Tooltip O-ring Seals, Kalrez 015 4079 Kalrez 0.691 0.551 0.070 Black O-K015
Tooltip O-ring Seals, Kalrez 016 4079 Kalrez 0.754 0.614 0.070 Black O-K016
Tooltip O-ring Seals, Kalrez 017 4079 Kalrez 0.816 0.676 0.070 Black O-K017
Tooltip O-ring Seals, Kalrez 018 4079 Kalrez 0.879 0.739 0.070 Black O-K018
Tooltip O-ring Seals, Kalrez 019 4079 Kalrez 0.941 0.801 0.070 Black O-K019
Tooltip O-ring Seals, Kalrez 020 4079 Kalrez 1.004 0.864 0.070 Black O-K020
Tooltip O-ring Seals, Kalrez 021 4079 Kalrez 1.066 0.926 0.070 Black O-K021
Tooltip O-ring Seals, Kalrez 022 4079 Kalrez 1.129 0.989 0.070 Black O-K022
Tooltip O-ring Seals, Kalrez 023 4079 Kalrez 1.191 1.051 0.070 Black O-K023
Tooltip O-ring Seals, Kalrez 024 4079 Kalrez 1.254 1.114 0.070 Black O-K024
Tooltip O-ring Seals, Kalrez 025 4079 Kalrez 1.316 1.176 0.070 Black O-K025
Tooltip O-ring Seals, Kalrez 026 4079 Kalrez 1.379 1.239 0.070 Black O-K026
Tooltip O-ring Seals, Kalrez 027 4079 Kalrez 1.441 1.301 0.070 Black O-K027
Tooltip O-ring Seals, Kalrez 028 4079 Kalrez 1.504 1.364 0.070 Black O-K028
Tooltip O-ring Seals, Kalrez 029 4079 Kalrez 1.629 1.489 0.070 Black O-K029
Tooltip O-ring Seals, Kalrez 030 4079 Kalrez 1.754 1.614 0.070 Black O-K030
Tooltip O-ring Seals, Kalrez 031 4079 Kalrez 1.879 1.739 0.070 Black O-K031
Tooltip O-ring Seals, Kalrez 032 4079 Kalrez 2.004 1.864 0.070 Black O-K032
Tooltip O-ring Seals, Kalrez 033 4079 Kalrez 2.129 1.989 0.070 Black O-K033
Tooltip O-ring Seals, Kalrez 034 4079 Kalrez 2.254 2.114 0.070 Black O-K034
Tooltip O-ring Seals, Kalrez 035 4079 Kalrez 2.379 2.239 0.070 Black O-K035
Tooltip O-ring Seals, Kalrez 036 4079 Kalrez 2.504 2.364 0.070 Black O-K036
Tooltip O-ring Seals, Kalrez 037 4079 Kalrez 2.629 2.489 0.070 Black O-K037
Tooltip O-ring Seals, Kalrez 038 4079 Kalrez 2.754 2.614 0.070 Black O-K038
Tooltip O-ring Seals, Kalrez 039 4079 Kalrez 2.879 2.739 0.070 Black O-K039
Tooltip O-ring Seals, Kalrez 040 4079 Kalrez 3.004 2.864 0.070 Black O-K040
Tooltip O-ring Seals, Kalrez 041 4079 Kalrez 3.129 2.989 0.070 Black O-K041
Tooltip O-ring Seals, Kalrez 042 4079 Kalrez 3.379 3.239 0.070 Black O-K042
Tooltip O-ring Seals, Kalrez 043 4079 Kalrez 3.629 3.489 0.070 Black O-K043
Tooltip O-ring Seals, Kalrez 044 4079 Kalrez 3.879 3.739 0.070 Black O-K044
Tooltip O-ring Seals, Kalrez 045 4079 Kalrez 4.129 3.989 0.070 Black O-K045
Tooltip O-ring Seals, Kalrez 046 4079 Kalrez 4.379 4.239 0.070 Black O-K046
Tooltip O-ring Seals, Kalrez 047 4079 Kalrez 4.629 4.489 0.070 Black O-K047
Tooltip O-ring Seals, Kalrez 048 4079 Kalrez 4.879 4.739 0.070 Black O-K048
Tooltip O-ring Seals, Kalrez 049 4079 Kalrez 5.129 4.989 0.070 Black O-K049
Tooltip O-ring Seals, Kalrez 050 4079 Kalrez 5.379 5.239 0.070 Black O-K050

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FAQ

Sputtering targets are materials used in thin-film deposition processes to create coatings on substrates. They are used in industries like semiconductors, optics, photovoltaics, and electronics.

Evaporation materials are used in Physical Vapor Deposition (PVD) processes, where materials are heated and evaporated to form a thin film on a substrate. These are critical for applications in optics, wear protection, and decorative coatings.

Boat crucibles are used as containers for evaporation materials during PVD processes. They help to uniformly evaporate materials onto the substrate for thin film formation.

Sputtering uses energetic particles to eject material from a target, while evaporation involves heating a material until it vaporizes and deposits on a substrate. Both are common methods in Physical Vapor Deposition (PVD) for creating thin films.

Consider the material composition, purity, target size, and application-specific requirements such as the thickness and uniformity of the film.

Yes, we offer customized sputtering targets, evaporation materials, and crucibles to meet specific customer requirements for size, material composition, and purity.

Yes, we can assist in selecting the most suitable material based on your application, whether it’s for optical coatings, semiconductor fabrication, or decorative finishes.

Yes, we offer both bulk and small quantities of sputtering targets, evaporation materials, and spherical powders to support research, prototyping, and development projects.

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