Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.103 Section): Ultra-Miniature Sealing for High-Purity, High-Temperature Applications
Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.103 section) from TFM are engineered for ultra-clean, high-performance micro-sealing applications in semiconductor, plasma, and chemical processing environments. Manufactured with Kalrez® 4079, these O-rings provide best-in-class resistance to corrosive chemicals, reactive gases, and thermal cycling up to 316°C, while maintaining low particle generation.
With a precise 0.103-inch cross-sectional diameter, this O-ring is ideal for compact and critical sealing points in gas delivery lines, miniaturized instrumentation, and UHV plasma chambers. Kalrez® 4079 offers excellent dimensional stability and very low compression set, making it the gold standard for demanding sealing applications requiring extreme chemical and thermal resistance.
Product Specifications:
Material Grade: Kalrez® 4079 (FFKM)
Color: Black
Durometer Hardness: 75 Shore A
Cross-Section Diameter: 0.103 inches
Temperature Range: –19°C to +316°C (continuous), higher for short durations
Key Performance Benefits:
Outstanding chemical compatibility with acids, solvents, and aggressive plasma gases
Low outgassing and minimal weight loss, ideal for UHV and cleanroom use
Superior compression set resistance, even after extended high-temperature exposure
Micro-sealing precision for analytical and semiconductor-grade fittings
Plasma-process-ready, supporting dry and wet semiconductor workflows
Not Recommended For:
Hot water or steam service
Hot aliphatic amines, ethylene oxide, or propylene oxide
Application Highlights:
Semiconductor process chambers (etch, ALD, PVD)
High-precision gas line and valve seals
Ultra-high vacuum systems in research and metrology
Analytical and miniature instrumentation interfaces
TFM’s Kalrez® FFKM O-Rings (0.103 section) provide the ultimate micro-sealing solution when space is limited but chemical resistance and thermal performance cannot be compromised.
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