Introduction
DN63CF (4.50″ OD) 304L Stainless Steel Standard ConFlat® (CF) UHV Flanges are widely used vacuum components designed for ultra-high-vacuum (UHV) systems requiring reliable, metal-sealed connections. Featuring the industry-standard CF knife-edge design, DN63CF flanges provide repeatable, leak-tight performance in demanding environments such as semiconductor processing, surface science, and advanced research equipment.
Detailed Description
DN63CF flanges are precision-machined from vacuum-grade 304L stainless steel, chosen for its low carbon content, excellent corrosion resistance, and low outgassing characteristics. The accurately formed knife edges create a metal-to-metal seal when compressed against an OFHC copper gasket, ensuring UHV compatibility even under repeated bakeout cycles.
With a 4.50 inch (114.3 mm) outer diameter, DN63CF flanges conform fully to international ConFlat® standards, allowing seamless integration with existing CF hardware. The robust stainless steel construction maintains dimensional stability at elevated temperatures and supports long-term vacuum integrity in critical applications.
Applications
Ultra-high-vacuum chambers and beamlines
Thin film deposition systems (PVD, sputtering, evaporation)
Semiconductor process equipment and load-locks
Surface analysis instruments (XPS, AES, UHV SEM interfaces)
Research and industrial UHV vacuum manifolds
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Flange Type | ConFlat® (CF), DN63 | Standard UHV interface |
| Outer Diameter | 4.50″ (114.3 mm) | System compatibility |
| Material | 304L Stainless Steel | Low outgassing, corrosion resistance |
| Sealing Method | Knife-edge with copper gasket | Reliable UHV sealing |
| Bolt Pattern | Standard DN63CF | Interchangeable with CF hardware |
| Bakeout Temperature | Up to ~450 °C | Suitable for UHV processes |
| Leak Rate | ≤ 1×10⁻¹⁰ mbar·L/s (typical) | Maintains UHV integrity |
Comparison with Related CF Flanges
| Flange Size | Key Advantage | Typical Application |
|---|---|---|
| DN63CF (304L SS) | Compact, UHV-rated | Instruments & small chambers |
| DN40CF | Smaller footprint | Analytical ports |
| DN100CF | Larger conductance | Pumping and main chamber ports |
FAQ
| Question | Answer |
|---|---|
| Are copper gaskets included? | Copper gaskets are typically supplied separately unless requested. |
| Is DN63CF suitable for repeated bakeouts? | Yes, 304L SS supports repeated high-temperature bake cycles. |
| Can electropolished versions be supplied? | Yes, electropolished finishes are available on request. |
| Are custom drilling patterns available? | Standard patterns are typical; custom options can be discussed. |
| How are knife edges protected during shipping? | Protective caps are used to prevent damage. |
Packaging
Our DN63CF 304L SS Standard ConFlat® UHV Flanges are thoroughly cleaned for vacuum service, with knife edges protected by caps. Each flange is individually packed using protective materials and shipped in export-grade cartons or wooden crates to ensure damage-free delivery.
Conclusion
DN63CF (4.50″ OD) 304L SS Standard ConFlat® (CF) UHV Flanges deliver proven sealing reliability, excellent thermal stability, and full compatibility with global CF standards. Their robust construction and precision machining make them an ideal choice for UHV systems in semiconductor, research, and high-technology applications.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.




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