Introduction
DN63CF (4.50″ OD) 316LN SS Standard ConFlat® (CF) UHV Flanges are precision-engineered vacuum components designed for ultra-high-vacuum (UHV) environments that demand exceptional sealing reliability, mechanical strength, and thermal stability. Utilizing the proven ConFlat knife-edge sealing principle, these flanges are widely adopted in advanced research facilities, semiconductor manufacturing, and high-performance vacuum systems.
Detailed Description
The DN63CF flange features a 4.50-inch outer diameter and accurately machined knife edges that deform a soft copper gasket to create a repeatable, metal-to-metal UHV seal. Manufactured from 316LN stainless steel, the alloy offers enhanced strength, improved resistance to corrosion, and excellent performance during high-temperature bakeouts. The controlled nitrogen content further improves mechanical stability while maintaining low outgassing characteristics.
These flanges are produced to tight dimensional tolerances to ensure full interchangeability with standard DN63CF hardware, including copper gaskets, studs, and nuts. The carefully finished sealing surfaces and consistent knife-edge geometry help minimize particle generation and ensure long-term vacuum integrity, even after multiple assembly cycles.
Key features include:
Precision ConFlat knife-edge geometry for copper gasket sealing
316LN stainless steel for superior strength and corrosion resistance
Excellent bakeout compatibility for UHV conditioning
Consistent dimensional accuracy for repeatable sealing performance
Applications
Ultra-high-vacuum chambers and experimental beamlines
Semiconductor process tools and load-lock systems
Thin film deposition equipment (PVD, sputtering, evaporation)
Surface science, accelerator, and physics research systems
High-temperature vacuum furnaces and analytical instruments
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Flange Type | DN63CF (ConFlat®) | Standard UHV interface |
| Outer Diameter | 4.50 in (≈114.3 mm) | Hardware and gasket compatibility |
| Material | 316LN Stainless Steel | Strength, corrosion resistance |
| Sealing Method | Copper gasket, knife-edge | Reliable metal UHV seal |
| Bakeout Capability | Up to ~450 °C (gasket-limited) | Suitable for UHV conditioning |
| Typical Leak Rate | ≤ 1×10⁻¹¹ mbar·L/s | Confirms UHV performance |
Comparison with Related CF Flanges
| Flange Size | Key Advantage | Typical Application |
|---|---|---|
| DN63CF (4.50″ OD) | Compact with high performance | UHV chambers & tools |
| DN40CF | Smaller footprint | Compact instruments |
| DN75CF | Larger aperture | Higher conductance systems |
FAQ
| Question | Answer |
|---|---|
| Are copper gaskets included? | Typically supplied separately unless specified. |
| Why choose 316LN over 304L? | 316LN offers higher strength and better corrosion resistance, especially at elevated temperatures. |
| Is this flange suitable for welding? | Yes, 316LN is well suited for welded vacuum assemblies. |
| Can these flanges be baked for UHV use? | Yes, within copper gasket temperature limits. |
| Are custom machining or welded assemblies available? | Yes, custom ports, blanks, and welded components can be provided. |
Packaging
Our DN63CF (4.50″ OD) 316LN SS Standard ConFlat® (CF) UHV Flanges are ultrasonically cleaned, capped on the knife-edge surfaces, and vacuum-packed. Each flange is clearly labeled and shipped with protective foam and export-grade cartons or wooden crates to maintain cleanliness and prevent damage during transportation.
Conclusion
DN63CF (4.50″ OD) 316LN SS Standard ConFlat® (CF) UHV Flanges deliver reliable metal sealing, excellent thermal performance, and long-term durability for demanding UHV applications. Their precision machining and high-grade stainless steel construction make them a dependable foundation for critical vacuum assemblies.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.



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