Product Overview
Iron Chromium Sputtering Target (Fe/Cr) is an alloy sputtering target used to deposit composition-controlled alloy films. Relative to a pure elemental target, the alloying constituents are introduced to tune electrical, magnetic, optical, mechanical, or adhesion-related film properties. For this reason, alloy ratio, homogeneity, purity basis, and the intended film composition should be defined clearly in the procurement specification.
Material and Deposition Characteristics
Many alloy targets are electrically conductive and can be compatible with DC or pulsed-DC magnetron sputtering, subject to the actual alloy composition and equipment capability. The target composition is not always reproduced exactly in the deposited film because preferential sputtering, re-sputtering, substrate heating, and process gas conditions can shift the final ratio. For composition-sensitive work, deposited-film analysis should be part of process qualification.
Technical Data
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Composition | Custom Fe/Cr ratio (e.g., 80/20, 70/30 wt%) | Controls corrosion & magnetic behavior |
| Purity | 99.9% – 99.99% | Reduces impurity-related defects |
| Density | ≥ 99% theoretical density | Ensures stable sputtering rate |
| Diameter | 1″ – 8″ (custom sizes available) | Fits various cathode systems |
| Thickness | 3 – 10 mm | Influences target lifetime |
| Bonding | Indium bonded to Cu backing optional | Enhances thermal stability |
| Sputtering Method | DC magnetron preferred | Suitable for metallic alloys |
| Material | Key Advantage | Typical Application |
|---|---|---|
| Iron Chromium (Fe/Cr) | Balanced strength & corrosion resistance | Protective coatings |
| Pure Iron (Fe) | High magnetic permeability | Magnetic films |
| Pure Chromium (Cr) | Excellent oxidation resistance | Hard protective layers |
| Stainless Steel Alloys | Complex alloy system with added elements | Structural & decorative films |
| Question | Answer |
|---|---|
| Can the Fe/Cr ratio be customized? | Yes, composition can be tailored to meet specific corrosion or magnetic performance requirements. |
| Is bonding recommended for large targets? | Yes, copper backing plates improve heat management and reduce cracking risk. |
| What sputtering method is recommended? | DC magnetron sputtering is typically used due to the alloy’s electrical conductivity. |
| Are rotary targets available? | Yes, rotary configurations can be supplied for in-line coating systems. |
| How is the product packaged? | Vacuum-sealed with protective cushioning and export-grade cartons or wooden crates. |
Typical Thin-Film Applications
- Iron Chromium alloy films where composition control is important to electrical, mechanical, magnetic, or optical performance
- Multilayer stacks, adhesion/barrier layers, conductive films, or functional coatings depending on the alloy system
- Research and production programs that require customized alloy ratios and repeatable sputtering behavior
Target Configuration and Ordering Considerations
For quotation and manufacturability review, provide target size, thickness, purity or alloy composition, quantity, and the sputtering gun or cathode model if known. If a bonded assembly is required, include backing-plate material, bonding preference, and any dimensional tolerances, surface-finish needs, or inspection-document requirements. TFM can also review customer drawings or old-target samples for replacement builds.
Frequently Asked Questions
Can the composition of a Iron Chromium sputtering target be customized?
Yes. For alloy targets, the required ratio should be specified clearly in wt% or at%. TFM can review custom compositions together with purity, dimensions, and manufacturability.
Will an alloy target always produce a film with the same composition?
Not necessarily. Preferential sputtering, substrate heating, process gas, and re-sputtering effects can shift the deposited composition relative to the nominal target chemistry. Film analysis should be used when the composition is critical.
Is a Iron Chromium alloy target compatible with DC magnetron sputtering?
Many metallic alloy targets are electrically conductive and can be compatible with DC or pulsed-DC sputtering, but the final choice depends on the actual alloy system and equipment.
Why is alloy homogeneity important in a Iron Chromium target?
A uniform alloy distribution helps support stable erosion and reduces local composition variation across the target, which in turn helps improve run-to-run consistency.
Can a Iron Chromium target be supplied bonded?
Yes. Where the cathode or thermal load requires it, TFM can supply bonded assemblies. Backing-plate material, target thickness, bonding method, and operating power should be reviewed together.
What should I include in an RFQ for Iron Chromium?
Specify the alloy composition, purity basis, dimensions, quantity, backing requirement, cathode model or drawing, and any tolerance, inspection, or documentation requirements.




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