Introduction
Lithium Tetrachloroaluminate Sputtering Targets are specialized compound targets developed for advanced thin film research where lithium-containing halide chemistry is required. Commonly referenced as LiAlCl₄ sputtering targets, these materials are of growing interest in solid-state battery research, ion-conductive films, and electrolyte-related thin film studies, where precise lithium content and chemical uniformity are essential.
Detailed Description
Lithium Tetrachloroaluminate (LiAlCl₄) is a lithium–aluminum chloride compound that requires strict control during target fabrication due to its chemical sensitivity. Targets are manufactured using carefully synthesized precursor materials, followed by controlled consolidation to achieve uniform composition and sufficient mechanical integrity for sputtering.
Because LiAlCl₄ is moisture-sensitive, special attention is given to atmosphere control during processing, machining, and packaging. Targets are typically supplied as ceramic-like compound discs or plates, suitable for RF magnetron sputtering, which is commonly required for non-metallic or weakly conductive materials.
For larger diameters or higher power densities, LiAlCl₄ sputtering targets can be supplied bonded to compatible backing plates to improve thermal stability and reduce the risk of cracking during deposition. Custom sizes, thicknesses, and bonding solutions are available to match specific cathode designs and research objectives.
Applications
Solid-state battery and lithium electrolyte thin film research
Ion-conductive and halide-based functional coatings
Electrochemical and energy storage material studies
Advanced materials science and laboratory R&D
Exploratory thin film deposition involving lithium compounds
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Material | Lithium Tetrachloroaluminate (LiAlCl₄) | Lithium-containing halide compound |
| Purity | 99.9% – 99.99% (total) | Affects ionic and chemical behavior |
| Target Form | Disc / Plate | Compatible with sputtering cathodes |
| Diameter | 25 – 200 mm (custom) | Fits standard RF sputtering systems |
| Thickness | 3 – 6 mm (typical) | Influences target lifetime |
| Sputtering Mode | RF magnetron sputtering | Suitable for compound targets |
| Backing Plate | Optional (application-dependent) | Improves thermal stability |
Comparison with Related Lithium Targets
| Material | Key Advantage | Typical Application |
|---|---|---|
| Lithium Tetrachloroaluminate (LiAlCl₄) | High lithium activity, halide chemistry | Solid-state electrolyte films |
| Lithium Oxide (Li₂O) | Oxide stability | Dielectric & battery films |
| Lithium Phosphate | Chemical robustness | Solid electrolyte research |
FAQ
| Question | Answer |
|---|---|
| Is LiAlCl₄ suitable for RF sputtering? | Yes, RF magnetron sputtering is recommended. |
| Can target size and purity be customized? | Yes, dimensions and purity grades can be tailored. |
| How is moisture sensitivity handled? | Targets are processed and packed under controlled, dry conditions. |
| Are bonded targets available? | Yes, bonding solutions can be provided upon request. |
| Is a Certificate of Analysis available? | Yes, CoA is available upon request. |
Packaging
Our Lithium Tetrachloroaluminate Sputtering Targets are handled and packed under strictly controlled environments. Each target is vacuum-sealed or inert-gas packed with moisture-barrier protection and clearly labeled to ensure material integrity during storage and transportation.
Conclusion
Lithium Tetrachloroaluminate Sputtering Targets (LiAlCl₄ Targets) provide reliable composition control and process compatibility for advanced lithium-based thin film research. With careful material handling, flexible customization options, and consistent quality control, these targets are well suited for solid-state battery development and next-generation energy material studies.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.
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