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Baseplate Couplings for Secure Vacuum Chamber Connections

ThinFilmMaterials offers precision-engineered Baseplate Couplings designed to provide stable, repeatable sealing between vacuum baseplates and removable chambers or accessories. These couplings allow for fast assembly and disassembly without compromising vacuum integrity, making them ideal for modular thin film and analytical systems.

Our Baseplate Couplings are machined from high-grade stainless steel and aluminum, offering excellent mechanical strength and corrosion resistance. The design ensures flat, uniform clamping with minimal particle generation, supporting vacuum levels down to 10⁻⁷ Torr or lower. Each set includes the mating baseplate and clamping hardware optimized for consistent compression force.

Key Features of Baseplate Couplings:

  • Precision-machined interface for high sealing reliability

  • Suitable for high vacuum (HV) and clean applications

  • Constructed from 304L stainless steel or aluminum

  • Available in multiple sizes and bolt patterns

  • Quick disconnect capability with repeatable positioning

Applications:

Baseplate Couplings are widely used in:

  • Modular vacuum deposition systems

  • Load-lock chambers and transfer stations

  • Research chambers with removable tops or tooling

  • R&D test setups requiring fast reconfiguration

  • UHV-compatible platforms with custom interface plates

At ThinFilmMaterials, we can supply Baseplate Couplings in standard designs or custom-machined to match your flange patterns and alignment needs. Optional features such as centering pins, O-ring grooves, and vacuum-compatible coatings are also available upon request.

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