OFHC Copper Backing Plates

1. The copper backing plates are machined from oxygen-free, high-conductivity copper (OFHC Copper).
2. For regular, circular disc-type sputtering sources – TORUS^® 2, 3, and 4 accept a 0.092″ thick backing plate, found in the list below.
3. Most sputter sources accept a 0.125″ (1/8″) thick target bonded to a 0.125″ thick backing plate.
4. For targets of other thicknesses, choose the backing plate thickness to adjust the total thickness to 0.250″ (1/4″) to suit most applications. 

NOTE:

• Those identified in the chart by diameter and thickness are plain discs without through or tapped holes.
• TFM can machine the copper backing plates according to requests. 
• They are suitable for most target sources, circular or rectangular, from other manufacturers, although they may need minor machining for screws, clamps, etc.
• Copper Cup Backing Plates are available upon request.