Product Overview
Cryolite Sputtering Target (Na3AlF6) is a composition-specific sputtering target for thin-film deposition and PVD process development. The practical specification normally includes chemistry, purity, dimensions, density, target configuration, and any bonding or backing requirement needed by the sputtering cathode.
Material and Deposition Characteristics
Power mode and process conditions should be selected according to the target conductivity, thermal behavior, and the requirements of the cathode system. For less common materials, conservative initial power density and film-composition verification are good practice.
Technical Data
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Chemical Formula | Na₃AlF₆ | Defines fluoride optical characteristics |
| Purity | 99.9% – 99.99% | Ensures optical clarity and film consistency |
| Diameter | 25 – 200 mm (custom) | Matches sputtering cathode holders |
| Thickness | 3 – 6 mm | Influences lifetime and deposition rate |
| Density | ≥ 95% theoretical | Reduces particle contamination |
| Bonding | Copper backing plate (optional) | Improves heat dissipation |
| Material | Key Advantage | Typical Application |
|---|---|---|
| Cryolite (Na₃AlF₆) | Low refractive index, stable fluoride film | AR coatings & optical stacks |
| Magnesium Fluoride (MgF₂) | Excellent UV transparency | UV optics & AR coatings |
| Aluminum Fluoride (AlF₃) | Good chemical stability | Protective fluoride coatings |
| Calcium Fluoride (CaF₂) | High IR transmission | Infrared optical systems |
| Question | Answer |
|---|---|
| Is Cryolite an insulating material? | Yes, it is a dielectric ceramic and typically requires RF sputtering. |
| Can the target be bonded to a backing plate? | Yes, copper backing improves thermal stability during sputtering. |
| Is it suitable for DC sputtering? | Generally no, unless specialized conductive configurations are used. |
| What film properties can be expected? | Low refractive index, high transparency, and good dielectric behavior. |
| How should it be stored? | Store in a dry environment to prevent moisture interaction. |
Typical Thin-Film Applications
- Thin-film research and materials-development projects requiring a composition-specific sputtering source
- Semiconductor, optical, energy, electronic, or laboratory coatings depending on the material system
- Custom R&D work where target composition, purity, and geometry need to be specified together
Target Configuration and Ordering Considerations
For quotation and manufacturability review, provide target size, thickness, purity or alloy composition, quantity, and the sputtering gun or cathode model if known. If a bonded assembly is required, include backing-plate material, bonding preference, and any dimensional tolerances, surface-finish needs, or inspection-document requirements. TFM can also review customer drawings or old-target samples for replacement builds.
Frequently Asked Questions
What is the main reason to use a Cryolite sputtering target?
It provides a composition-specific source for thin-film deposition when the target material itself is important to the desired film chemistry or process.
How should the sputtering mode for Cryolite be selected?
The power mode should be chosen according to target conductivity, thermal behavior, and equipment capability. Less-conductive materials are commonly evaluated with RF power.
Why are density and microstructure important for Cryolite targets?
These factors can influence erosion stability, thermal behavior, particle generation, and the risk of cracking or local hot spots.
Can Cryolite be supplied with a backing plate?
Yes. If the material is brittle or the cathode requires it, a bonded configuration can be reviewed according to target size, thickness, cooling, and power.
Does target composition always equal film composition?
No. Film chemistry may differ because of sputtering yields, process conditions, substrate temperature, re-sputtering, and chamber history. Film verification is recommended when composition matters.
What should I provide to request a quotation for Cryolite?
Please provide the composition, purity, dimensions, quantity, target configuration, cathode details, and any drawing or inspection requirements.
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