Semiconductor Circular Gate Valves
Protection Gate Valve
The Protection Gate Valve features a rapid-action design that safeguards in-process products during vacuum pump failures. This stainless steel valve, equipped with bellows seals and pneumatic actuation, includes a controller unit that can monitor up to four pumps. Users benefit from both local and remote control options, along with an LCD status display for real-time monitoring.
GV Series Gate Valve
Circular Gate Valves handle applications in semiconductor and other processing, and are used most often to isolate pumps and sample entry locks from HV work chambers. Optional roughing ports and soft start features available on request.