Stainless Steel 3-Position Pressure Control Gate Valves (Pneumatic)
Stainless Steel 3-Position Pressure Control Gate Valves (Pneumatic)
ThinFilmMaterials supplies advanced Stainless Steel 3-Position Pressure Control Gate Valves (Pneumatic) engineered for precise control of pressure and conductance in vacuum and gas handling systems. These pneumatically actuated gate valves provide three selectable positions—fully open, fully closed, and a fixed intermediate position—enabling stable throttling and flow restriction between vacuum process stages.
Each Stainless Steel 3-Position Pressure Control Gate Valve (Pneumatic) features an all-metal construction with 304L or 316L stainless steel components, a sealed welded bellows, and high-cycle durability for cleanroom or semiconductor applications. The intermediate position is mechanically limited and preset at the factory or upon request to support consistent conductance control during pumpdown or pressure stabilization.
Key Features:
Three-position actuation: Open / Closed / Mid-throttle
Pneumatic operation with position control ports
Welded stainless steel bellows for UHV compatibility
Materials: 304L or 316L stainless steel
Vacuum rating: Down to 10⁻⁹ Torr
Sizes: Available from 1.5″ to 8″ with ISO or CF flanges
Optional: Limit switches, visual indicators, and throttle adjustment
Applications:
Stainless Steel 3-Position Pressure Control Gate Valves (Pneumatic) are ideal for:
Throttling vacuum conductance in process chambers
Pumpdown control in load-lock or transfer systems
Gas isolation and flow control in semiconductor tools
Plasma processing and ALD/CVD systems
Research and pilot-scale thin film deposition setups
ThinFilmMaterials offers both standard and customized configurations to meet demanding vacuum engineering needs. All valves are leak-tested and prepared for high-purity service.