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Bellows Sealed Stainless Steel Gate Valves (Pneumatic) for High-Vacuum Automation

ThinFilmMaterials offers reliable Bellows Sealed Stainless Steel Gate Valves (Pneumatic) engineered for automatic vacuum isolation in high-vacuum and ultra-high-vacuum (UHV) systems. These pneumatically actuated valves provide fast, repeatable sealing while eliminating elastomer stem seals through the use of a fully welded stainless steel bellows assembly.

Each Bellows Sealed Stainless Steel Gate Valve (Pneumatic) is built for clean operation, long cycle life, and low particle generation. The all-metal design and precision-machined gate and body ensure secure sealing even under thermal cycling and frequent actuation, making them ideal for production environments.

Key Features:

  • Welded bellows for leak-free actuation and zero stem leakage

  • Vacuum performance: ≤ 1×10⁻⁹ Torr

  • Pneumatic actuation (air-open/air-close or air-open/spring-close options)

  • Available sizes: 1.5″ to 8″ ports

  • End connections: CF flanges, ISO-F, or custom flanges

  • High cycle life for cleanroom and semiconductor tools

Applications:

Bellows Sealed Stainless Steel Gate Valves (Pneumatic) are commonly used in:

  • Semiconductor fabrication systems

  • Thin film deposition tools (PVD/CVD/ALD)

  • Load-locks and transfer chambers

  • Beamline isolation in synchrotron and research facilities

  • Vacuum automation and process tools

These valves support remote control and integration into automated process lines. Optional features include limit switches, position indicators, and high-temperature configurations for demanding applications.

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