High-Performance Valves for Vacuum Applications
Designed for use with cryopumps, turbomolecular pumps, and ion pumps, these valves are perfect for situations demanding clean, high-vacuum environments and minimal maintenance. They offer several advantages in durability, reliability, and smooth operation.
Built for Extended Use
These rugged valves are built to last, sharing the core design elements of standard valves but enhanced to endure over 1 million cycles before requiring any servicing. Their reinforced bellows are engineered for an extended operating lifespan.
Durable Construction
All moving joints are crafted from 304 stainless steel, which is hardened to boost durability, minimize particulate production, and ensure smoother actuation. In the case of power failure, the valves maintain their closed position, providing added reliability.
Advanced Sealing and Control Features
Equipped with fluorocarbon seals, these valves can withstand temperatures up to 150°C and are bakeable. Additionally, they are fitted with electropneumatic operators for precision control. The body-mounted solenoid includes a manual override for easy operation, while the 120 VAC solenoid features speed controls for enhanced actuation smoothness.
Flexible Sizing and Position Indicators
Available in sizes ranging from 1.5″ to 12.0″, these valves are equipped with magnetic reed switches that act as position indicators, offering easy monitoring and integration into various vacuum systems.
TFM provides these high-performance valves, ensuring a reliable solution for your vacuum application needs.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 7.501 x 10-10 Torr Max: 760 Torrmbar Min: 1.000 x 10-9 mbar Max: 1013 mbar |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator 60.0 ºC 140 ºFBakeable 150 ºC 302 ºF |
| Shaft Seal Material | Bellows Sealed |
| Cycle Life | 1,000,000 |
| Actuator Type | Pneumatic Double Acting |
| Solenoid Kit Included | No Yes |
| Max Differential Pressure Before Open | 22.5 Torr |
| Bonnet Seal Type | Fluorocarbon (FKM) |
| Valve Body Material | Stainless Steel |
| Valve Seal Material | Fluorocarbon (FKM) |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Thread | Part Number |
| KF16 (1.18" OD) | Fluorocarbon (FKM) | No | N/A | SGM0063QF |
| KF40 (2.16" OD) | Fluorocarbon (FKM) | Yes | N/A | SGM0150QF |
| KF50 (2.95" OD) | Fluorocarbon (FKM) | Yes | N/A | SGM0200QF |
| ISO63-F (5.12" OD) | Fluorocarbon (FKM) | Yes | M8 | SGM0250IF |
| ISO63-K (3.74" OD) | Fluorocarbon (FKM) | Yes | N/A | SGM0250IK |
| ISO80-F (5.71" OD) | Fluorocarbon (FKM) | Yes | M8 | SGM0300IF |
| ISO80-K (4.33" OD) | Fluorocarbon (FKM) | Yes | N/A | SGM0300IK |
| ISO100-F (6.50" OD) | Fluorocarbon (FKM) | Yes | M8 | SGM0400IF |
| ISO100-K (5.12" OD) | Fluorocarbon (FKM) | Yes | N/A | SGM0400IK |
| ISO160-F (8.86" OD) | Fluorocarbon (FKM) | Yes | M10 | SGM0600IF |
| ISO160-K (7.09" OD) | Fluorocarbon (FKM) | Yes | N/A | SGM0600IK |
| ISO200-F (11.22" OD) | Fluorocarbon (FKM) | Yes | M10 | SGM0800IF |
| ISO200-K (9.45" OD) | Fluorocarbon (FKM) | Yes | N/A | SGM0800IK |
| ISO250-F (13.19" OD) | Fluorocarbon (FKM) | Yes | M10 | SGM1000IF |
| ISO250-K (11.42" OD) | Fluorocarbon (FKM) | Yes | N/A | SGM1000IK |
| ISO320-F (16.73" OD) | Fluorocarbon (FKM) | Yes | M12 | SGM1200IF |
| ISO320-K (14.57" OD) | Fluorocarbon (FKM) | Yes | N/A | SGM1200IK |
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