CF Flanged SS 3-Position Gate Valves (Pneumatic)
These CF flanged stainless steel 3-position pneumatic gate valves are commonly utilized in upstream pressure control applications, often working alongside mass flow controllers to provide precise flow regulation. The valves feature a micrometer-adjustable third position that allows for partial remote actuation, offering flexible control over the open position.
Constructed with vacuum furnace brazing at 1100°C and 10⁻⁶ torr, both the body and internal components ensure superior joint integrity, effectively eliminating risks of “virtual leaks” or entrapment areas. This advanced brazing process also minimizes body distortion, a common issue with traditional welded valves. For easier maintenance, the carriage assembly can be removed without the need to disconnect the valve from the system.
Key Features:
- Electropolished stainless steel construction: Enhances durability and corrosion resistance.
- Minimal interior surface area: Among the smallest in the vacuum valve industry, reducing potential contamination risks.
- Positive shut-off mechanism: The valve stays closed in the event of power loss coupled with a pressure drop, ensuring operational safety.
- Innovative air cylinder design: Free of mechanical locks within the vacuum, significantly reducing shock and vibration during use.
- Perfect for semiconductor applications: Optimized for sensitive environments like semiconductor manufacturing and similar precision processes.
Available for purchase from TFM, these valves offer reliable performance in critical high-vacuum applications.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 7.501 x 10-10 Torr Max: 760 Torrmbar Min: 1.000 x 10-9 mbar Max: 1013 mbar |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator 60.0 ºC 140 ºFBakeable 150 ºC 302 ºF |
| Shaft Seal Material | Bellows Sealed |
| Cycle Life | 1,000,000 |
| Actuator Type | Pneumatic 3 Position |
| Solenoid Kit Included | Yes |
| Position Indicators | Yes |
| Max Differential Pressure Before Open | 22.5 Torr |
| Bonnet Seal Type | Fluorocarbon (FKM) |
| Valve Body Material | Stainless Steel |
| Valve Seal Material | Fluorocarbon (FKM) |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Part Number |
| DN100CF (6.00" OD) | Fluorocarbon (FKM) | Yes | SGP0400CF |
| DN160CF (8.00" OD) | Fluorocarbon (FKM) | Yes | SGP0600CF |
| DN200CF (10.00" OD) | Fluorocarbon (FKM) | Yes | SGP0800CF |
| DN250CF (12.00" OD) | Fluorocarbon (FKM) | Yes | SGP1000CF |
| DN275CF (13.25" OD) | Fluorocarbon (FKM) | Yes | SGP1075CF |
| DN295CF (14.00" OD) | Fluorocarbon (FKM) | Yes | SGP1200CF |
Reviews
There are no reviews yet.