Valves for Semiconductor and Processing Applications
These valves are designed to effectively isolate pumps and sample entry locks from high vacuum (HV) or ultra-high vacuum (UHV) work chambers.
Features:
- CF Flanged with Fluorocarbon O-Ring: Suitable for atmospheric operation down to a pressure range of 10⁻⁹ torr, and bakeable up to 150°C (when in the open position).
- Material: Constructed from general-purpose electropolished stainless steel.
- Vacuum Brazing: Performed at 1,100°C, ensuring reliable operation under HV and UHV conditions.
- High Conductance: Compact design optimized for superior flow efficiency.
- Shock-Free Operation: Minimizes vibration for stable performance.
- Durability: Designed for 100,000 cycles before maintenance is required.
- Operational Modes: Available in manual or pneumatic configurations.
- Pneumatic Safety: Valves remain closed during power loss or air pressure failure.
- Position Indication: All models with a 1.5″ flange O.D. or larger include magnetic REED switches for accurate position feedback.
- Solenoid Operator: Pneumatic models come with a 120VAC solenoid operator at no additional cost; alternative voltages (both AC and DC) can be provided upon request.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 7.501 x 10-10 Torr Max: 760 Torrmbar Min: 1.000 x 10-9 mbar Max: 1013 mbar |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator 60.0 ºC 140 ºFBakeable 150 ºC 302 ºF |
| Shaft Seal Material | Bellows Sealed |
| Cycle Life | 100,000 |
| Actuator Type | Pneumatic Double Acting |
| Solenoid Kit Included | No Yes |
| Max Differential Pressure Before Open | 22.5 Torr |
| Bonnet Seal Type | Fluorocarbon (FKM) |
| Valve Body Material | Stainless Steel |
| Valve Seal Material | Fluorocarbon (FKM) |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit | Part Number |
| DN16CF (1.33" OD) | Fluorocarbon (FKM) | No | SG0063PVCF |
| DN16CF (1.33" OD) | Fluorocarbon (FKM) | No | SG0063PVCFM |
| DN35CF-DN40CF (2.75" OD) | Fluorocarbon (FKM) | Yes | SG0150PVCF |
| DN35CF-DN40CF (2.75" OD) | Fluorocarbon (FKM) | Yes | SG0150PVCFM |
| DN50CF (3.38" OD) | Fluorocarbon (FKM) | — | SG0200PVCF |
| DN50CF (3.38" OD) | Fluorocarbon (FKM) | — | SG0200PVCFM |
| DN63CF (4.50" OD) | Fluorocarbon (FKM) | — | SG0250PVCF |
| DN63CF (4.50" OD) | Fluorocarbon (FKM) | — | SG0250PVCFM |
| DN75CF (4.63" OD) | Fluorocarbon (FKM) | — | SG0300PVCF |
| DN75CF (4.63" OD) | Fluorocarbon (FKM) | — | SG0300PVCFM |
| DN100CF (6.00" OD) | Fluorocarbon (FKM) | — | SG0400PVCF |
| DN100CF (6.00" OD) | Fluorocarbon (FKM) | — | SG0400PVCFM |
| DN160CF (8.00" OD) | Fluorocarbon (FKM) | — | SG0600PVCF |
| DN160CF (8.00" OD) | Fluorocarbon (FKM) | — | SG0600PVCFM |
| DN200CF (10.00" OD) | Fluorocarbon (FKM) | — | SG0800PVCF |
| DN200CF (10.00" OD) | Fluorocarbon (FKM) | — | SG0800PVCFM |
| DN250CF (12.00" OD) | Fluorocarbon (FKM) | — | SG1000PVCF |
| DN250CF (12.00" OD) | Fluorocarbon (FKM) | — | SG1000PVCFM |
| DN275CF (13.25" OD) | Fluorocarbon (FKM) | — | SG1075PVCF |
| DN275CF (13.25" OD) | Fluorocarbon (FKM) | — | SG1075PVCFM |
| DN295CF (14.00" OD) | Fluorocarbon (FKM) | — | SG1200PVCF |
| DN295CF (14.00" OD) | Fluorocarbon (FKM) | — | SG1200PVCFM |
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