Angle Valves
Semiconductor Angle Valves
Angle valves are specifically designed for semiconductor processes, where they are heated to prevent vapor condensation on cold spots in the chamber and foreline.
Stainless Steel Bellows Sealed Angle Valves (Manual)
Bellows sealed angle valves, available in nearly all flange types, protect the actuator from process gases in the foreline, where they are commonly used.
Aluminum Block Angle Valves (Manual)
Cost-effective valves primarily used in the foreline to isolate roughing pumps, such as dry scroll or rotary vane pumps.
Stainless Steel Bellows Sealed Angle Valves (Pneumatic)
Bellows sealed angle valves, available in most flange types, provide actuator protection from process gases in the foreline, where they are typically used.
Aluminum Block Angle Valves (Pneumatic)
Pneumatic block valves provide a cost-effective solution with remote functionality, primarily used in the foreline to isolate roughing pumps, such as dry scroll or rotary vane pumps.
Stainless Steel Bellows Sealed Angle Valves (Electromagnetic)
Bellows sealed angle valves, available in nearly all flange types, offer actuator protection from process gases, typically used in the foreline.
Aluminum Block Angle Valves (Electromagnetic)
Electromagnetic block valves provide remote control capability where air lines are unavailable, making them ideal for isolating roughing pumps like dry scroll or rotary vane pumps.