Stainless Steel Bellows Sealed Angle Valves (Pneumatic)
Stainless Steel Bellows Sealed Angle Valves (Pneumatic) for Automated Vacuum Control
ThinFilmMaterials supplies precision-engineered Stainless Steel Bellows Sealed Angle Valves (Pneumatic) designed for automated control of gas and vacuum flows in high and ultra-high vacuum systems. These valves use pneumatically actuated mechanisms to enable quick and reliable open/close operations, while a welded stainless steel bellows provides leak-tight stem sealing with zero elastomer exposure.
Each Stainless Steel Bellows Sealed Angle Valve (Pneumatic) features a compact angle-body design, minimizing system footprint while supporting fast actuation and excellent sealing performance. The all-metal structure ensures compatibility with cleanroom, semiconductor, and UHV environments.
Key Features:
Welded bellows seal for stem leakage protection
Vacuum rated to 10⁻⁹ Torr and below
Pneumatic actuator: air-open/air-close or air-open/spring-close
Body materials: 304L or 316L stainless steel
Flange options: CF, ISO, or weld stub ends
Available sizes: 1.5″ to 4″ port diameter
Applications:
Stainless Steel Bellows Sealed Angle Valves (Pneumatic) are ideal for:
Automated vacuum isolation in forelines and pump lines
Load-lock and transfer chamber isolation
High-throughput semiconductor manufacturing
Thin film deposition and plasma systems
Research-grade UHV platforms and beamline facilities
ThinFilmMaterials provides both standard and custom versions of Stainless Steel Bellows Sealed Angle Valves (Pneumatic), including optional limit switches, position sensors, and electropolished internals. All valves are helium leak-tested and compatible with automated control systems.