Introduction
Pneumatic Bellows Sealed Stainless Steel (SS) Angle Valves with ConFlat (CF) flanges are precision vacuum control components designed for high-vacuum (HV) and ultra-high-vacuum (UHV) systems. Featuring metal bellows isolation and pneumatic actuation, these valves deliver particle-free operation, excellent leak tightness, and fast, repeatable switching—making them ideal for automated processes in semiconductor, research, and advanced industrial vacuum environments.
Detailed Description
These angle valves employ a welded stainless-steel bellows to hermetically separate the actuator from the vacuum volume. By eliminating dynamic shaft seals, the design prevents lubricant migration, reduces outgassing, and avoids particle generation—key requirements for clean HV/UHV applications. Reinforced bellows geometry provides high fatigue resistance and long cycle life under frequent actuation.
CF (ConFlat) flanges use knife-edge metal sealing with OFHC copper gaskets, ensuring robust, bakeable, all-metal vacuum connections. The angle-body configuration optimizes conductance control while saving installation space compared with inline valves. Pneumatic actuation (single- or double-acting) provides consistent closing force and rapid response, supporting integration into automated toolsets and interlock systems.
Valve bodies are machined from 304 or 316L stainless steel for corrosion resistance and vacuum cleanliness. Seat designs and surface finishes are optimized to maintain low leak rates and stable performance across repeated bake-out cycles.
Applications
Pneumatic Bellows Sealed SS Angle Valves (CF flanged) are widely used in:
UHV and high-vacuum process systems
Semiconductor manufacturing tools
Thin-film deposition (PVD, CVD, ALD)
Vacuum chamber isolation and pump lines
Synchrotron, accelerator, and beamline facilities
Research laboratories and automated vacuum platforms
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Flange Standard | CF16 / CF35 / CF63 / CF100 (custom) | Ensures UHV-compatible connections |
| Actuation | Pneumatic (single or double acting) | Enables automation and fast switching |
| Body Material | 304 / 316L Stainless Steel | Vacuum cleanliness and durability |
| Seal Type | Bellows sealed stem | Eliminates dynamic leaks and particles |
| Leak Rate | ≤ 1 × 10⁻¹⁰ mbar·L/s | Maintains UHV integrity |
| Operating Pressure | Atmosphere to UHV | Broad application range |
| Bake-Out Temperature | Up to ~450 °C (CF side) | Supports UHV bake-out |
| Cycle Life | ≥ 10⁵ cycles (design-dependent) | Long-term reliability |
Comparison with Related Valve Types
| Valve Type | Key Advantage | Typical Application |
|---|---|---|
| CF Bellows Sealed Angle Valve (Pneumatic) | Clean, bakeable, automated | UHV semiconductor & research |
| CF Manual Angle Valve | Simple operation | Non-automated systems |
| KF Angle Valve | Quick connect | Rough to high vacuum |
| Gate Valve | Maximum conductance | Large chambers |
FAQ
| Question | Answer |
|---|---|
| Why choose bellows sealing for UHV? | It prevents outgassing and particle generation from dynamic seals. |
| What air pressure is required? | Typically 0.4–0.6 MPa of clean, dry compressed air. |
| Are these valves bakeable? | Yes, CF metal seals support high-temperature bake-out. |
| Can actuator orientation be customized? | Yes, actuator position and accessories can be specified. |
| Are helium leak tests available? | Yes, leak testing can be provided prior to shipment. |
Packaging
Each Pneumatic Bellows Sealed SS Angle Valve (CF flanged) is cleaned to vacuum standards, capped, and securely packaged with shock-absorbing materials. Clear labeling ensures traceability and safe handling during storage and transportation.
Conclusion
Pneumatic Bellows Sealed SS Angle Valves with CF flanges provide a robust, contamination-free solution for automated control in HV/UHV systems. Their all-metal sealing, pneumatic reliability, and compatibility with high-temperature bake-out make them a preferred choice for semiconductor manufacturing, research laboratories, and advanced vacuum applications.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Position Indicators | Part Number |
| DN16CF (1.33" OD) | Copper | No | No | SA0075PCCF |
| DN16CF (1.33" OD) | Fluorocarbon (FKM) | No | Yes | SA0075PVCF |
| DN35CF-DN40CF (2.75" OD) | Copper | No | No | SA0150PCCF |
| DN35CF-DN40CF (2.75" OD) | Fluorocarbon (FKM) | No | Yes | SA0150PVCF |
| DN50CF (3.38" OD) | Copper | No | No | SA0200PCCF |
| DN63CF (4.50" OD) | Copper | No | No | SA0250PCCF |
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