High-Performance Valves for Rough and High Vacuum Environments
TFM’s valves are ideal for both rough and high vacuum applications, capable of functioning effectively at pressures below 1 x 10⁻⁹ torr. These valves can be baked to temperatures of up to 100°C, enhancing their suitability for various processes.
Leak Testing and Actuation Options
During manufacturing, each valve is rigorously tested for leak rates through the main valve seal, achieving less than 1 x 10⁻⁹ std cc/sec with helium. TFM offers a variety of actuation options, including manual, pneumatic, and electromagnetic configurations.
Electromagnetic Actuated Valves
The electromagnetic actuated valves incorporate a double-wound coil paired with an electronic switching circuit. This design ensures low power consumption and minimizes operating temperature while extending the cycle life of the valve.
- Position Indication: Each valve includes a twin reed switch to clearly indicate whether the valve is open or closed.
- Surge Protection: The circuit is fused to safeguard against surges and transient low voltage spikes, ensuring reliable operation.
Maintenance and Reliability
Sealed grease-free bellows are designed to reduce maintenance requirements and enhance operational reliability, achieving up to 500,000 cycles for larger flange sizes and 130,000 cycles for KF25 and smaller sizes.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr 7.520 x 10-10 Torr mbar 1.000 x 10-9 mbar |
| Rates | Leak Rate 1.000 x 10-9 mbar*L/s 7.520 x 10-10 Torr*L/s |
| Temperature | Actuator 45.0 ºC 113 ºFClosed Bake 45.0 ºC 113 ºFOpen Bake 45.0 ºC 113 ºF |
| Bonnet Seal Type | Fluorocarbon (FKM) |
| Valve Body Material | HE30TF Al |
| Poppet Material | Fluorocarbon (FKM) |
| Shaft Seal | Bellows |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Voltage | Part Number |
| KF16 (1.18" OD) | Fluorocarbon (FKM) | 110/120VAC | C41203000 |
| KF25 (1.57" OD) | Fluorocarbon (FKM) | 220/240VAC | C41301000 |
| KF25 (1.57" OD) | Fluorocarbon (FKM) | 110/120VAC | C41303000 |
| KF40 (2.16" OD) | Fluorocarbon (FKM) | 220/240VAC | C41401000 |
| KF40 (2.16" OD) | Fluorocarbon (FKM) | 110/120VAC | C41403000 |
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