Features
These components serve as reliable and economical general-purpose solutions for High Vacuum (HV) and Ultra High Vacuum (UHV) applications, prioritizing cleanliness and corrosion resistance.
In the Open Position:
When opened, the edge-welded bellows and valve seat retract from the gas path, facilitating high conductance.
Key Specifications:
- Leak Rate: Maintains a leak rate of 2 × 10⁻⁹ mbar L/s across the seat for optimal performance.
- Pressure Range:
- Maximum: Atmospheric pressure
- Minimum: 1 × 10⁻⁹ Torr
- Sealing Technology: Features fluorocarbon o-ring seat seals, bellows-sealed shafts, and bonnet seals. For improved high-temperature bakeout and enhanced ultimate vacuum, copper options are available.
- Actuation Options: Available in manual or pneumatic actuation for versatile operation.
- Maintenance: Regular repairs can be performed without removing the valve body from the system, simplifying maintenance efforts.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 1.000 x 10-9 Torr Max: 760 Torrmbar 1.330 x 10-9 mbar atm 1.00 atm |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator 80.0 ºC 176 ºFClosed Bake 100 ºC 212 ºFOpen Bake 100 ºC 212 ºF |
| Actuator Type | Pneumatic Single Acting |
| Solenoid Kit Included | No |
| Position Indicators | No |
| Bonnet Seal Type | Viton |
| Valve Body Material | 304L SS |
| Valve Seal Material | Viton |
| Shaft Seal | Bellows |




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