Introduction
Flex Metal Bellows – Edge Welded with Tube Ends are precision-engineered components designed to provide controlled flexibility, vibration isolation, and thermal expansion compensation in vacuum and high-purity process systems. By combining the superior flexibility of edge-welded bellows with straight tube ends, these assemblies offer maximum integration freedom for custom vacuum piping, welded manifolds, and motion-sensitive equipment.
Detailed Description
Edge-welded metal bellows are manufactured by welding thin, precision-formed diaphragms at their outer and inner edges, creating a sealed, highly flexible structure with low spring rates and excellent fatigue resistance. Compared with formed bellows, edge-welded designs allow more accurate control of axial, lateral, and angular movement, making them ideal for applications requiring repeatable motion or alignment tolerance.
Tube ends replace standard flanges, enabling direct welding into vacuum lines or process assemblies. This configuration minimizes dead volume, reduces leak paths, and supports compact system layouts. Tube ends can be supplied as straight, beveled, or prepared for orbital welding, depending on installation requirements.
Materials such as 304L and 316L stainless steel are commonly used due to their excellent corrosion resistance, weldability, and vacuum compatibility. Bellows geometry—including wall thickness, convolution count, and free length—is optimized to balance flexibility, pressure stability, and service life. Each assembly can be tailored to meet specific mechanical and vacuum performance requirements.
Applications
Flex Metal Edge-Welded Bellows with Tube Ends are widely used in:
High-vacuum and ultra-high-vacuum (UHV) systems
Semiconductor process tools and vacuum chambers
Thin-film deposition equipment (PVD, CVD, ALD)
Custom vacuum piping and manifolds
Motion feedthroughs and precision positioning systems
Thermal expansion compensation in rigid tubing
Vibration isolation for sensitive instruments
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Material | 304L / 316L Stainless Steel | Ensures corrosion resistance and vacuum cleanliness |
| End Connection | Tube ends (custom OD/ID) | Allows direct welding and compact integration |
| Leak Rate | ≤ 1 × 10⁻¹⁰ mbar·L/s | Maintains high-integrity vacuum systems |
| Motion Type | Axial, lateral, angular | Supports flexible system design |
| Operating Pressure | Vacuum to atmosphere | Suitable for most vacuum applications |
| Temperature | Up to 450 °C (material-dependent) | Compatible with bake-out processes |
| Cycle Life | 10⁵ – 10⁶ cycles (design-dependent) | Long-term operational reliability |
Comparison with Related Configurations
| Configuration | Key Advantage | Typical Application |
|---|---|---|
| Edge-Welded Bellows with Tube Ends | Compact, weld-in design | Custom vacuum lines |
| Edge-Welded Bellows with CF Flanges | UHV metal sealing | Research & semiconductor tools |
| Formed Metal Bellows | Higher pressure tolerance | Industrial piping systems |
FAQ
| Question | Answer |
|---|---|
| Can tube dimensions be customized? | Yes, tube OD, ID, length, and weld prep can be specified. |
| Are these bellows suitable for UHV use? | Yes, when properly cleaned and welded, they support UHV environments. |
| Can they be supplied pre-cleaned? | Vacuum cleaning and packaging are available upon request. |
| What welding methods are supported? | TIG, orbital, and laser welding preparations can be provided. |
| Are special alloys available? | Nickel-based or other specialty alloys can be supplied if required. |
Packaging
Our Flex Metal Bellows – Edge Welded with Tube Ends are thoroughly cleaned, capped, and vacuum-sealed to prevent contamination. Each unit is clearly labeled for identification and protected with reinforced cushioning to ensure safe storage and transportation.
Conclusion
Flex Metal Bellows – Edge Welded with Tube Ends offer a highly adaptable solution for vacuum and precision process systems where space efficiency, cleanliness, and mechanical reliability are critical. Their weld-in design, excellent flexibility, and customizable geometry make them ideal for advanced research, semiconductor, and high-purity industrial applications.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.
Ordering Table
| Drawing | BellowsOD | BellowsID | Length(extended) | Length(compressed) | DimA | DimB | DimC | Part Number |
| 0.4 | 0.2 | 0.21 | 0.08 | 0.25 | 0.04 | 0.3 | MEW0400201E |
|
| 0.64 | 0.34 | 0.32 | 0.08 | 0.44 | 0.04 | 0.41 | MEW0640341E |
|
| 0.75 | 0.25 | 0.53 | 0.16 | 0.5 | 0.04 | 0.43 | MEW0750251E |
|
| 0.84 | 0.52 | 0.34 | 0.08 | 0.56 | 0.04 | 0.43 | MEW0840521E |
|
| 1.03 | 0.55 | 0.5 | 0.16 | 0.69 | 0.04 | 0.43 | MEW1030551E |
|
| 1.25 | 0.75 | 0.53 | 0.16 | 0.88 | 0.04 | 0.43 | MEW1250751E |
|
| 1.36 | 0.54 | 1.2 | 0.22 | 0.94 | 0.04 | 0.43 | MEW1360541E |
|
| 1.38 | 0.83 | 0.69 | 0.19 | 1 | 0.04 | 0.43 | MEW1380831E |
|
| 1.5 | 0.96 | 0.57 | 0.12 | 1.13 | 0.04 | 0.43 | MEW1500961E |
|
| 1.63 | 0.75 | 0.92 | 0.2 | 1 | 0.04 | 0.44 | MEW1620751E |
|
| 1.89 | 1.39 | 0.74 | 0.17 | 1.5 | 0.04 | 0.44 | MEW1891391E |
|
| 2 | 1.25 | 0.79 | 0.2 | 1.25 | 0.04 | 0.44 | MEW2001251E |
|
| 2.2 | 1.04 | 1.22 | 0.2 | 1.5 | 0.04 | 0.44 | MEW2201041E |
|
| 2.25 | 1.5 | 0.79 | 0.16 | 1.5 | 0.04 | 0.44 | MEW2251501E |
|
| 2.49 | 1.53 | 1.01 | 0.2 | 1.63 | 0.04 | 0.44 | MEW2491531E |
|
| 2.5 | 1.75 | 0.79 | 0.2 | 1.88 | 0.04 | 0.44 | MEW2501751E |
|
| 2.75 | 1.75 | 1.05 | 0.2 | 1.88 | 0.04 | 0.44 | MEW2751751E |
|
| 3 | 2 | 1.05 | 0.2 | 2.13 | 0.07 | 0.59 | MEW3002001E |
|
| 3.25 | 2.25 | 1.05 | 0.24 | 2.38 | 0.07 | 0.59 | MEW3252251E |
|
| 3.5 | 2 | 1.58 | 0.24 | 2.38 | 0.07 | 0.59 | MEW3502001E |
|
| 3.5 | 2.5 | 1.05 | 0.16 | 2.63 | 0.07 | 0.59 | MEW3502501E |
|
| 3.99 | 2.69 | 1.37 | 0.24 | 2.75 | 0.07 | 0.59 | MEW3992691E |
|
| 4.25 | 3.2 | 1.1 | 0.28 | 3.75 | 0.07 | 0.59 | MEW4253201E |
|
| 4.35 | 3.64 | 0.75 | 0.16 | 3.75 | 0.07 | 0.59 | MEW4353641E |
|
| 4.75 | 3.75 | 1.05 | 0.2 | 4 | 0.07 | 0.59 | MEW4753751E |
|
| 4.97 | 4 | 1.12 | 0.22 | 4.25 | 0.07 | 0.59 | MEW4974001E |
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