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Pneumatic Viewport Shutters

Pneumatic Viewport Shutters

Pneumatic Viewport Shutters: Reliable Protection and Precision Operation in UHV Systems

Pneumatic Viewport Shutters from TFM are designed to safeguard critical optical components in high- and ultra-high vacuum (UHV) environments. These shutters provide an effective barrier against material deposition during coating, etching, or evaporation processes, preserving viewport clarity and system performance. Built for environments where precision, automation, and cleanliness are essential, these shutters are indispensable in semiconductor fabrication, surface analysis systems, and thin film deposition chambers.

Crafted for operational integrity under harsh conditions, TFM’s pneumatic shutters integrate a robust actuator mechanism that enables precise, repeatable operation. They remain closed during material deposition, opening only under designated safe conditions to maintain both system integrity and operator safety.

Key Performance Features:

  • Deposition Shielding: Protects viewport glass from contamination and buildup during sputtering or evaporation processes.

  • UHV Compatibility: Reliable operation at base pressures below 10⁻⁹ Torr, ensuring suitability for ultra-clean environments.

  • Bakeable to 250°C: Withstands high-temperature bakeout cycles for decontamination without degrading mechanical performance.

Pneumatic Actuation System:

  • Solenoid-Ready Control: Uses a solenoid-operated spool valve (not included) to direct compressed gas between actuator ports. The shutter opens when energized and returns to a default closed position when de-energized.

  • Adjustable Sweep Stops: Integrated stops allow users to precisely set the angular sweep of the shutter plate for optimal clearance.

  • Flow Regulation: Built-in air flow regulators at each port maintain consistent, controlled operation.

  • Quick Maintenance: The actuator assembly detaches with two cap screws, allowing fast removal for system bakeouts or servicing.

  • Input Pressure Rating: Operates effectively at input pressures up to 98 psi, ensuring responsive motion under controlled airflow.

Typical Applications:

  • Semiconductor process chambers

  • Molecular beam epitaxy (MBE) systems

  • Ion beam deposition equipment

  • Surface science instrumentation

  • Custom UHV research systems

TFM’s Pneumatic Viewport Shutters deliver reliable shielding and controlled actuation, ensuring long-term clarity of optical access and enhanced system uptime in precision vacuum environments. Whether used in R&D or production, these shutters are engineered for consistent performance under pressure—literally.

Ordering Table

Drawing Flange / Mounting Flange Material Actuation Type PartNumber
Tooltip DN35CF-DN40CF (2.75" OD) 304L SS Pneumatic DS275VPS-P
Tooltip DN63CF (4.50" OD) 304L SS Pneumatic DS450VPS-P
Tooltip DN100CF (6.00" OD) 304L SS Pneumatic DS600VPS-P
Tooltip DN160CF (8.00" OD) 304L SS Pneumatic DS800VPS-P

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FAQ

Tube fittings are designed for tubes (measured by outside diameter and wall thickness) used in high-pressure and instrumentation applications, whereas pipe fittings are for pipes (identified by nominal pipe size) primarily used in fluid transport.

 

Common valve types include ball valves, gate valves, check valves, butterfly valves, and globe valves. Each serves a specific function—from quick shutoff (ball/gate valves) to flow regulation (globe valves).

 

  • For tubing, measure the outside diameter; for pipes, refer to the nominal pipe size (using conversion charts if needed). Always match the valve or fitting size to your pipe’s dimensions and flow requirements.

  • Frequently used thread types include NPT (National Pipe Tapered), BSP (British Standard Pipe), and UNC, along with slip-fit options that rely on compression or fusion rather than threads.

Interchangeability depends on manufacturer specifications and certification. Always verify compatibility via manufacturer guides or certified interchangeability charts.

 

  • A coupling is a short, straight fitting used to join two pipes or tubes. It provides a secure, leak-tight connection and can sometimes serve to extend or repair piping runs.

Consider valve type, pressure and temperature ratings, material compatibility with your fluid, actuation method (manual or automatic), and maintenance requirements.

 

  • Valves regulate flow by opening, closing, or partially obstructing the pathway. Their mechanisms (such as the rotation of a ball or the linear movement of a gate) determine the speed and precision of flow control.

  • A flange is a flat, circular component used to connect pipes, valves, or other equipment. Bolted together with gaskets, flanges provide a secure, leak-proof joint that facilitates both assembly and maintenance.

  • Manual valves require physical operation via handles or levers, whereas actuated valves use mechanisms—pneumatic, electric, or hydraulic—to open and close automatically or remotely.

  • Issues include leaks caused by improper installation, over-tightening, degraded seals, material incompatibility, and fatigue from repeated cycling. Regular inspection and proper installation practices help mitigate these problems.

Regular maintenance involves periodic inspections, cleaning or replacing worn seals, ensuring proper torque during installation, and adhering to manufacturer guidelines and local plumbing codes to preserve system integrity.

 

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