MSDS File
Introduction
Zirconium Evaporation Materials (Zr) are widely used in physical vapor deposition (PVD) processes where high film purity, strong adhesion, and excellent corrosion resistance are required. As a reactive transition metal with strong oxygen and nitrogen affinity, zirconium plays a key role in optical coatings, protective layers, and functional thin films across semiconductor, optics, and energy-related industries.
Detailed Description
Zirconium evaporation materials are produced from high-purity zirconium metal through vacuum melting and precision machining to ensure controlled composition and minimal impurity levels. They are commonly supplied in forms such as pellets, granules, pieces, slugs, wire, or custom-cut shapes to suit different evaporation sources, including resistance boats, crucibles, and electron-beam (e-beam) systems.
One of zirconium’s most valuable characteristics is its strong chemical reactivity with residual gases such as oxygen and nitrogen. During evaporation, this property enables the formation of dense, adherent metallic zirconium films or zirconium-based compound films when used in reactive evaporation environments. Zirconium coatings exhibit excellent corrosion resistance, thermal stability, and mechanical robustness, making them suitable for demanding service conditions.
Compared with many other refractory metals, zirconium offers a balanced combination of moderate melting point, good evaporation behavior, and compatibility with standard PVD equipment. Strict control of surface cleanliness and purity is essential, as trace impurities can significantly affect film optical and electrical performance. For this reason, zirconium evaporation materials are carefully cleaned and packaged to preserve their high-purity state.
Applications
Zirconium Evaporation Materials are commonly used in:
Optical coatings and interference filters
Decorative and protective thin films
Corrosion-resistant coatings
Semiconductor device fabrication
Getter and oxygen-scavenging layers
Energy-related coatings and R&D applications
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Material | Zirconium (Zr) | Base metal for zirconium thin films |
| Purity | 99.9% – 99.99% | Minimizes contamination and defects |
| Form | Pellets, pieces, granules, wire | Compatible with various evaporation sources |
| Melting Point | ~1855 °C | Influences evaporation method selection |
| Evaporation Method | Thermal / E-beam | Flexible PVD process compatibility |
| Oxygen Content | Controlled (low ppm) | Critical for film quality and consistency |
Comparison with Related Evaporation Materials
| Material | Key Advantage | Typical Application |
|---|---|---|
| Zirconium (Zr) | Strong adhesion, corrosion resistance | Optical & protective coatings |
| Titanium (Ti) | Excellent adhesion | General-purpose PVD films |
| Hafnium (Hf) | Higher temperature stability | High-end optical coatings |
FAQ
| Question | Answer |
|---|---|
| What evaporation methods are suitable for zirconium? | Both thermal evaporation and electron-beam evaporation are commonly used. |
| Can zirconium be used for reactive evaporation? | Yes, it is frequently used with oxygen or nitrogen to form compound films. |
| Are custom forms available? | Yes, size, shape, and form can be customized. |
| How should zirconium materials be stored? | In vacuum-sealed or inert packaging to prevent oxidation. |
| Is zirconium suitable for optical applications? | Yes, zirconium films and compounds are widely used in optical coatings. |
Packaging
Our Zirconium Evaporation Materials are meticulously cleaned and vacuum-sealed to minimize oxidation and contamination. Each batch is clearly labeled and securely packed with protective materials to ensure safe storage and transportation while preserving material integrity.
Conclusion
Zirconium Evaporation Materials (Zr) provide a reliable and versatile solution for high-performance thin film deposition. With high purity, multiple form options, and excellent film properties, zirconium is an ideal choice for optical, semiconductor, and advanced coating applications.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.
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