Bellows Sealed Stainless Steel Gate Valves (Pneumatic)
Bellows Sealed Stainless Steel Gate Valves (Pneumatic) for High-Vacuum Automation
ThinFilmMaterials offers reliable Bellows Sealed Stainless Steel Gate Valves (Pneumatic) engineered for automatic vacuum isolation in high-vacuum and ultra-high-vacuum (UHV) systems. These pneumatically actuated valves provide fast, repeatable sealing while eliminating elastomer stem seals through the use of a fully welded stainless steel bellows assembly.
Each Bellows Sealed Stainless Steel Gate Valve (Pneumatic) is built for clean operation, long cycle life, and low particle generation. The all-metal design and precision-machined gate and body ensure secure sealing even under thermal cycling and frequent actuation, making them ideal for production environments.
Key Features:
Welded bellows for leak-free actuation and zero stem leakage
Vacuum performance: ≤ 1×10⁻⁹ Torr
Pneumatic actuation (air-open/air-close or air-open/spring-close options)
Available sizes: 1.5″ to 8″ ports
End connections: CF flanges, ISO-F, or custom flanges
High cycle life for cleanroom and semiconductor tools
Applications:
Bellows Sealed Stainless Steel Gate Valves (Pneumatic) are commonly used in:
Semiconductor fabrication systems
Thin film deposition tools (PVD/CVD/ALD)
Load-locks and transfer chambers
Beamline isolation in synchrotron and research facilities
Vacuum automation and process tools
These valves support remote control and integration into automated process lines. Optional features include limit switches, position indicators, and high-temperature configurations for demanding applications.