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ST0063 Aluminum Magnesium Sputtering Target, Al/Mg

Chemical Formula: Al/Mg
Catalog Number: ST0063
CAS Number: 1302-88-1
Purity: 99.9%, 99.95%, 99.99%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made

Aluminum Magnesium sputtering target  come in various forms, purities, sizes, and prices. Thin Film Materials (TFM) manufactures and supplies top-quality sputtering targets at competitive prices.

Introduction

Aluminum Magnesium Sputtering Targets are widely used alloy targets for advanced thin-film deposition, combining the lightweight nature of aluminum with the enhanced mechanical strength and chemical reactivity of magnesium. This alloy system is especially valued in functional coatings, microelectronics, and optical applications where controlled film composition, adhesion, and electrical performance are critical.

Detailed Description

Our Aluminum Magnesium Sputtering Targets are manufactured from high-purity aluminum and magnesium raw materials using controlled alloying and densification processes to ensure compositional uniformity and stable sputtering behavior. Compared with pure aluminum targets, the addition of magnesium improves hardness, reduces film resistivity in certain compositions, and enhances film adhesion on glass, ceramic, and polymer substrates.

The alloy composition can be precisely adjusted (for example, AlMg 2–10 wt%) to meet specific deposition requirements. Uniform grain structure and high density help minimize particle generation and arcing during sputtering, contributing to consistent deposition rates and improved target utilization.

Targets are available in round, rectangular, and custom shapes, compatible with both DC and RF magnetron sputtering systems. Optional copper or titanium backing plates can be supplied to improve thermal conductivity, mechanical stability, and target lifetime during high-power operation.

Applications

Aluminum Magnesium Sputtering Targets are commonly used in:

  • Semiconductor and microelectronic thin films

  • Display and touch panel coatings

  • Optical and decorative coatings

  • Barrier and protective layers

  • Functional films for energy and sensor devices

They are particularly suitable where balanced electrical conductivity, adhesion, and corrosion resistance are required.

Technical Parameters

ParameterTypical Value / RangeImportance
CompositionAl–Mg alloy (custom ratios)Controls film properties and performance
Purity99.9% – 99.99%Reduces contamination in thin films
ShapeRound / Rectangular / CustomFits various sputtering systems
Density≥ 99% theoreticalEnsures stable sputtering and uniform erosion
BondingIndium, elastomer, or monolithicImproves heat transfer and mechanical stability
Backing PlateCopper or Titanium (optional)Enhances thermal management

Comparison with Related Materials

MaterialKey AdvantageTypical Application
Aluminum Magnesium Sputtering TargetImproved strength and adhesionFunctional & electronic coatings
Pure Aluminum TargetHigh conductivity, simple compositionGeneral metallization
Aluminum Silicon TargetEnhanced hardnessSemiconductor interconnects

FAQ

QuestionAnswer
Can the alloy composition be customized?Yes, aluminum–magnesium ratios can be tailored to your process needs.
Is it suitable for DC sputtering?Yes, depending on composition and system design, DC sputtering is commonly used.
Are backing plates available?Yes, copper or titanium backing plates can be supplied upon request.
What sizes are available?Standard and custom sizes are available to match your sputtering equipment.

Packaging

Our Aluminum Magnesium Sputtering Targets are carefully tagged and labeled for full traceability. Each target is vacuum-sealed and packed with protective materials to prevent oxidation, contamination, or mechanical damage during storage and transportation.

Conclusion

Aluminum Magnesium Sputtering Targets offer a versatile and reliable solution for depositing high-performance alloy thin films. With customizable composition, high purity, and stable sputtering behavior, they are well suited for demanding research and industrial applications.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.

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FAQ

It’s the source material (in solid form) used in sputter deposition to eject atoms or molecules that then form a thin film on a substrate.

Targets can be pure metals (e.g., gold, copper, aluminum), ceramics (e.g., Al₂O₃, SiO₂, TiO₂), alloys, or composites—chosen based on the film’s desired properties.

 

They are produced by processes such as melting/casting for metals or sintering (often with hot isostatic pressing) for ceramics and composite targets to ensure high density and purity.

 

In a vacuum chamber, a plasma (typically argon) bombards the target, ejecting atoms that travel and condense on a substrate, forming a thin film.

 

Key factors include the target’s purity, density, grain structure, and the sputtering yield (i.e. how many atoms are ejected per incident ion), as well as operating conditions like power density and gas pressure.

 

Operators monitor target erosion (often by measuring the depth of the eroded “race track”) or track total energy delivered (kilowatt-hours) until it reaches a threshold that can compromise film quality.

 

Fragile materials (such as many ceramics or certain oxides) and precious metals often require a backing plate to improve cooling, mechanical stability, and to allow thinner targets that reduce material costs.

 

DC sputtering is used for conductive targets, while RF sputtering is necessary for insulating targets (like many oxides) because it prevents charge buildup on the target’s surface.

 

In reactive sputtering, a reactive gas (e.g., oxygen or nitrogen) is introduced to form compound films on the substrate, but it may also “poison” the target surface if not carefully controlled.

 

Many manufacturers prefer to control raw material quality by sourcing their own powders; using external powders can risk impurities and inconsistent target properties.

 

Targets should be stored in clean, dry conditions (often in original packaging or re-wrapped in protective materials) and handled with gloves to avoid contamination, ensuring optimal performance during deposition.

Deposition rate depends on factors such as target material and composition, power density, working gas pressure, substrate distance, and the configuration of the sputtering system (e.g., magnetron design).

 
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