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Auto-Soft Flow Actuated Check Valves (KF Flanged)

Auto-Soft Flow Actuated Check Valves (KF Flanged)

TFM’s Auto-Soft flow actuated check valves are designed to replace a KF centering ring, facilitating easy installation and effective throttling of roughing pumps during initial evacuation. When the roughing pump operates, the initial flow causes the vane assembly to close, automatically regulating the pump’s performance. The valves then reopen automatically when a predetermined pressure differential is achieved.

Key Features

  • Durable Construction: Made from 304 stainless steel with an Elgiloy® spring for enhanced durability and corrosion resistance.
  • Temperature Tolerance: Capable of operating at a maximum temperature of 100°C.
  • Reduced Turbulence: Minimizes turbulence in the system by lowering the initial pumping speed, which is especially beneficial in sensitive applications.
  • Application Versatility: Ideal for environments sensitive to particle disruption, such as semiconductor and thin film manufacturing.
  • Complementary Use: Can be used with vent valves when venting a system to mitigate extreme pressure differentials and minimize turbulence.
  • Substrate Protection: Helps prevent damage to substrates during the pumping process.
  • Cost-Effective: Replaces expensive pressure control bypass valves, offering a more economical solution.
  • Fast Action: Features fast-action vane closing, achieving closure in 12 ms or better during testing.
  • No Electrical Power Required: Operates effectively without the need for electrical power.

Performance Notes

  • The typical pump-down time using the soft start check valve is increased by three times.
  • Test results, measured using a 27 CFM pump evacuating a volume of 100 liters, may vary based on the specific system configuration.

Specifications Table

Manufacturer
RatesClosing Flow
6.00 CFM
2.80 L/s
Opening Pressure
2.67 mbar
2.00 Torr
TemperatureBakeable
100 ºC
212 ºF
Actuator
Type
Spring
Spring
Material
Elgiloy
Bearing
Material
Teflon
Vane
Material
Inconel 625
Valve Body
Material
304L SS
Valve Seal
Material
Viton

Ordering Table

Flange SizeClosing Time (sec.)Required Clearance (in.)Part Number
KF40 (2.16″ OD)0.010.7225-0040
KF50 (2.95″ OD)0.0121225-0050

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FAQ

Sputtering targets are materials used in thin-film deposition processes to create coatings on substrates. They are used in industries like semiconductors, optics, photovoltaics, and electronics.

Evaporation materials are used in Physical Vapor Deposition (PVD) processes, where materials are heated and evaporated to form a thin film on a substrate. These are critical for applications in optics, wear protection, and decorative coatings.

Boat crucibles are used as containers for evaporation materials during PVD processes. They help to uniformly evaporate materials onto the substrate for thin film formation.

Sputtering uses energetic particles to eject material from a target, while evaporation involves heating a material until it vaporizes and deposits on a substrate. Both are common methods in Physical Vapor Deposition (PVD) for creating thin films.

Consider the material composition, purity, target size, and application-specific requirements such as the thickness and uniformity of the film.

Yes, we offer customized sputtering targets, evaporation materials, and crucibles to meet specific customer requirements for size, material composition, and purity.

Yes, we can assist in selecting the most suitable material based on your application, whether it’s for optical coatings, semiconductor fabrication, or decorative finishes.

Yes, we offer both bulk and small quantities of sputtering targets, evaporation materials, and spherical powders to support research, prototyping, and development projects.

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