Dependable, cost-efficient components for HV and UHV applications, focusing on cleanliness and corrosion resistance.
- In the open position, edge-welded bellows and valve seats are positioned outside the gas flow, ensuring high conductance.
- Capable of enduring intermittent baking at temperatures up to 200°C (150°C continuous), which enhances ultimate vacuum performance.
Features:
- Includes fluorocarbon O-ring seat seals, bellows-sealed shafts, and bonnet seals (copper options available for higher-temperature bakeout and better ultimate vacuum).
- Repairs can be performed without removing the valve body from the system.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr 7.520 x 10-9 Torr mbar 1.000 x 10-8 mbar |
| Rates | Leak Rate 2.000 x 10-9 mbar*L/s 1.504 x 10-9 Torr*L/s |
| Temperature | Actuator 80.0 ºC 176 ºFClosed Bake 100 ºC 212 ºFOpen Bake 100 ºC 212 ºF |
| Bonnet Seal Type | Fluorocarbon (FKM) |
| Valve Body Material | 304L SS |
| Poppet Material | Fluorocarbon (FKM) |
| Shaft Seal | Welded Bellows |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Note | Part Number |
| DN16CF (1.33" OD) | Copper | Limited availability and specially priced. | SA0075MCCF |
| DN16CF (1.33" OD) | Fluorocarbon (FKM) | — | SA0075MVCF |
| DN35CF-DN40CF (2.75" OD) | Copper | — | SA0150MCCF |
| DN35CF-DN40CF (2.75" OD) | Fluorocarbon (FKM) | — | SA0150MVCF |
| DN63CF (4.50" OD) | Copper | — | SA0250MCCF |
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