Gate Valves for Semiconductor, R&D, and Industrial Applications
Gate valves play a crucial role in semiconductor manufacturing, research and development, and various industrial processes. They are primarily designed to isolate pumps and sample entry locks from high vacuum (HV) or ultra-high vacuum (UHV) work chambers.
Key Features
- CF Flanged with Copper Gasket: These valves operate effectively in atmospheric pressures down to the 10⁻¹¹ torr range and can be baked up to 200°C when the actuator is removed.
- High-Quality Construction: Made from polished stainless steel, these gate valves ensure superior durability and reliability in demanding environments.
- Compact Design with High Conductance: Their innovative design allows for excellent conductance while maintaining a compact footprint, making them ideal for space-constrained applications.
- Long Service Life: Engineered for longevity, these valves can withstand up to 100,000 cycles before requiring maintenance, ensuring minimal downtime.
- Power Loss Safety: The pneumatic design guarantees that the valves will close or remain closed in case of power loss or a drop in air pressure, enhancing system safety.
- Position Indication: All pneumatic models with a 2.75″ flange O.D. and larger come equipped with magnetic REED switches for position indication, with optional micro-switches available for additional monitoring capabilities.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 1.000 x 10-11 Torr Max: 760 Torrmbar Min: 1.333 x 10-11 mbar Max: 1013 mbar |
| Rates | Helium Leak Rate 5.000 x 10-10 mbar*L/s 3.759 x 10-10 Torr*L/s |
| Temperature | Closed Bake 150 ºC 302 ºFOpen Bake 200 ºC 392 ºF |
| Shaft Seal Material | Bellows Sealed |
| Cycle Life | 100,000 |
| Actuator Type | Pneumatic Double Acting |
| Solenoid Kit Included | No |
| Position Indicators | Yes |
| Max Differential Pressure Before Open | 27.0 Torr |
| Bonnet Seal Type | Copper |
| Valve Body Material | Stainless Steel |
| Valve Seal Material | Fluorocarbon (FKM) |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Part Number |
| DN35CF-DN40CF (2.75" OD) | Copper | No | GU0150PCCFM |
| DN63CF (4.50" OD) | Copper | No | GU0250PCCFM |
| DN100CF (6.00" OD) | Copper | No | GU0400PCCFM |
| DN160CF (8.00" OD) | Copper | No | GU0600PCCFM |
| DN200CF (10.00" OD) | Copper | No | GU0800PCCFM |
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