Versatile Valves for High-Vacuum Applications
Designed for use with cryopumps, turbomolecular pumps, and ion pumps, these robust valves are perfect for environments that demand clean, high-vacuum, and low-maintenance performance.
Durability and Longevity
Engineered to last, these rugged valves incorporate key features of standard models but are enhanced to endure over 1 million cycles before any servicing is needed. The reinforced bellows ensure an extended operating life, while all moving components are constructed from 304 stainless steel. This hardening process not only boosts durability but also reduces particle generation and enables smoother valve operation.
Fail-Safe and Reliable Performance
The valves are designed to maintain a closed position in the event of power loss, providing critical reliability in vacuum systems. They are equipped with fluorocarbon seals, which are bakeable up to 150°C, and electropneumatic operators, ensuring long-lasting performance even under demanding conditions.
Easy Control and Smooth Actuation
Control is made simple with a body-mounted solenoid that features a manual override, allowing for convenient adjustments. The 120 VAC solenoid also includes speed controls to ensure smooth actuation for the user. Models ranging from 1.5″ to 12.0″ come with magnetic reed switches that serve as position indicators, adding another layer of operational control.
TFM offers these high-performance valves, built for long life and reliable functionality in high-vacuum environments.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 7.501 x 10-10 Torr Max: 760 Torrmbar Min: 1.000 x 10-9 mbar Max: 1013 mbar |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator 60.0 ºC 140 ºFBakeable 150 ºC 302 ºF |
| Shaft Seal Material | Bellows Sealed |
| Cycle Life | 1,000,000 |
| Actuator Type | Pneumatic Double Acting |
| Solenoid Kit Included | No Yes |
| Max Differential Pressure Before Open | 22.5 Torr |
| Bonnet Seal Type | Fluorocarbon (FKM) |
| Valve Body Material | Stainless Steel |
| Valve Seal Material | Fluorocarbon (FKM) |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Part Number |
| DN16CF (1.33" OD) | Fluorocarbon (FKM) | No | SGM0063CF |
| DN35CF-DN40CF (2.75" OD) | Fluorocarbon (FKM) | Yes | SGM0150CF |
| DN50CF (3.38" OD) | Fluorocarbon (FKM) | Yes | SGM0200CF |
| DN63CF (4.50" OD) | Fluorocarbon (FKM) | Yes | SGM0250CF |
| DN75CF (4.63" OD) | Fluorocarbon (FKM) | Yes | SGM0300CF |
| DN100CF (6.00" OD) | Fluorocarbon (FKM) | Yes | SGM0400CF |
| DN160CF (8.00" OD) | Fluorocarbon (FKM) | Yes | SGM0600CF |
| DN200CF (10.00" OD) | Fluorocarbon (FKM) | Yes | SGM0800CF |
| DN250CF (12.00" OD) | Fluorocarbon (FKM) | Yes | SGM1000CF |
| DN275CF (13.25" OD) | Fluorocarbon (FKM) | Yes | SGM1075CF |
| DN295CF (14.00" OD) | Fluorocarbon (FKM) | Yes | SGM1200CF |
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