Introduction
CF Flanged Stainless Steel Million Cycle Gate Valves (Pneumatic) are engineered for ultra-high vacuum (UHV) systems where long service life, clean operation, and repeatable sealing performance are critical. Designed to withstand over one million open–close cycles, these valves are widely used in semiconductor fabrication, thin-film deposition, surface science, and research vacuum systems that demand exceptional reliability and minimal particle generation.
By combining all-metal CF flange sealing, precision-machined stainless steel bodies, and robust pneumatic actuation, these gate valves provide dependable isolation in demanding high-vacuum and UHV environments.
Detailed Description
These pneumatic CF gate valves are manufactured from high-grade stainless steel, typically 304L or 316L, ensuring excellent corrosion resistance, low outgassing rates, and compatibility with aggressive vacuum processes. The CF (ConFlat) flange design uses knife-edge metal sealing with copper gaskets, delivering leak-tight performance suitable for pressures down to the 10⁻¹⁰ mbar range.
The million-cycle rating is achieved through optimized internal mechanics, hardened sealing surfaces, and low-wear guidance systems that minimize friction and particle generation during operation. Pneumatic actuation enables fast, repeatable valve motion and seamless integration with automated vacuum control systems, PLCs, and interlock logic.
Careful attention is given to surface finish and internal geometry to reduce virtual leaks and trapped volumes, making these valves ideal for cleanroom and UHV applications. Optional position indicators and solenoid valves further enhance operational safety and process monitoring.
Applications
CF Flanged SS Million Cycle Gate Valves (Pneumatic) are commonly used in:
Semiconductor process chambers and load-lock systems
Thin film deposition (PVD, sputtering, evaporation) equipment
Molecular beam epitaxy (MBE) systems
Surface analysis and UHV research instruments
Accelerator and beamline vacuum systems
High-reliability industrial vacuum automation lines
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Flange Standard | CF (ConFlat) | Ensures all-metal UHV sealing |
| Material | 304L / 316L Stainless Steel | Low outgassing, corrosion resistance |
| Actuation | Pneumatic (air-driven) | Fast, repeatable automation |
| Leak Rate | ≤ 1 × 10⁻¹⁰ mbar·L/s | Suitable for UHV systems |
| Cycle Life | ≥ 1,000,000 cycles | Long-term reliability |
| Operating Pressure | UHV to atmosphere | Flexible system integration |
| Position Feedback | Optional (open/closed) | Process control and safety |
Comparison with Related Valve Types
| Valve Type | Key Advantage | Typical Use Case |
|---|---|---|
| CF Flanged SS Million Cycle Gate Valve (Pneumatic) | Ultra-long lifetime, UHV compatibility | Semiconductor & research |
| Manual CF Gate Valve | Simple design, lower cost | Low-frequency operation |
| ISO-KF / ISO-F Gate Valve | Faster installation | High-vacuum (non-UHV) systems |
| Butterfly Valve | Compact, high conductance | Roughing or backing lines |
FAQ
| Question | Answer |
|---|---|
| Can the valve be customized? | Yes, flange size, material grade, actuator type, and accessories can be customized. |
| Is it suitable for UHV applications? | Yes, CF flanges and metal sealing make it ideal for UHV systems. |
| Does it support automation? | Fully compatible with PLCs, interlocks, and automated vacuum systems. |
| What maintenance is required? | Minimal; designed for long service life with reduced wear components. |
| Are cleanroom versions available? | Yes, cleanroom-compatible configurations are available upon request. |
Packaging
Our CF Flanged SS Million Cycle Gate Valves (Pneumatic) are carefully cleaned, sealed, and packed to maintain vacuum integrity and surface cleanliness. Each valve is protected with anti-contamination wrapping and shock-absorbing materials, then secured in export-grade cartons or wooden crates to ensure safe storage and international transportation.
Conclusion
CF Flanged Stainless Steel Million Cycle Gate Valves (Pneumatic) deliver exceptional durability, precise vacuum isolation, and UHV-level sealing performance for advanced vacuum systems. Their long cycle life and automation-ready design make them a dependable choice for semiconductor manufacturing, research laboratories, and high-end industrial vacuum applications.
For detailed specifications, drawings, or a quotation, please contact us at sales@thinfilmmaterials.com.
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Part Number |
| DN16CF (1.33" OD) | Fluorocarbon (FKM) | No | SGM0063CF |
| DN35CF-DN40CF (2.75" OD) | Fluorocarbon (FKM) | Yes | SGM0150CF |
| DN50CF (3.38" OD) | Fluorocarbon (FKM) | Yes | SGM0200CF |
| DN63CF (4.50" OD) | Fluorocarbon (FKM) | Yes | SGM0250CF |
| DN75CF (4.63" OD) | Fluorocarbon (FKM) | Yes | SGM0300CF |
| DN100CF (6.00" OD) | Fluorocarbon (FKM) | Yes | SGM0400CF |
| DN160CF (8.00" OD) | Fluorocarbon (FKM) | Yes | SGM0600CF |
| DN200CF (10.00" OD) | Fluorocarbon (FKM) | Yes | SGM0800CF |
| DN250CF (12.00" OD) | Fluorocarbon (FKM) | Yes | SGM1000CF |
| DN275CF (13.25" OD) | Fluorocarbon (FKM) | Yes | SGM1075CF |
| DN295CF (14.00" OD) | Fluorocarbon (FKM) | Yes | SGM1200CF |
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