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Fast-Entry Access Load Lock Doors

Fast-Entry Access Load Lock Doors: Quick, Reliable Entry for UHV Chambers and Load Locks

TFM’s Fast-Entry Access Load Lock Doors are purpose-built for applications requiring rapid and repeatable access to vacuum vessels, including process chambers, load locks, and analytical ports. Engineered for ultra-high vacuum (UHV) compatibility, these doors feature robust sealing, precision hinge assemblies, and field-replaceable components—all designed to streamline operations and reduce maintenance downtime.

Each access door integrates seamlessly with standard UHV flanges and includes a threaded closure knob and removable viewport glass for quick entry without compromising vacuum performance.

Key Features of Fast-Entry Access Load Lock Doors:

  • Wide Range of UHV Flange Sizes
    Available in multiple CF flange sizes, ensuring compatibility with most chamber ports and modular vacuum systems. Viewport-equipped models provide direct optical access.

  • Precision-Hinged Access Design
    The doors utilize a stainless steel hinge mechanism and fluorocarbon O-ring seal to deliver consistent, vacuum-tight closure through repeated cycles.

  • Counterbored Mounting Bolt Configuration
    Based on the KJLC® bolt design, each flange includes recessed bolt holes to maximize usable aperture space. Matching socket head bolt kits are sold separately.

  • Easy-Access Viewport Glass
    Viewports are sealed with an o-ring and are user-removable for cleaning, replacement, or optical adjustment. Standard models ship with tempered Pyrex glass; fused quartz is available upon request.

  • Secure and Simple Operation
    A threaded locking knob maintains positive closure during pumpdown. For safety, it is recommended to disengage the knob during venting to prevent overpressurization.

Applications:

  • Load lock entry on PVD/CVD process chambers

  • Transfer port access in UHV analytical equipment

  • Optical inspection ports in semiconductor or optics systems

  • General-purpose fast entry points for HV/UHV vacuum platforms

  • Retrofit or upgrade for legacy vacuum chamber designs

TFM also offers a complete line of Fast-Entry Access Load Lock Doors Hardware & Replacement Parts, including hinges, o-rings, glass inserts, and bolt kits, ensuring long-term serviceability and vacuum performance.

For flange size selection, material compatibility, or viewport options, consult the TFM support team or our vacuum hardware catalog.

Ordering Table

A Flange Size B Door Opening C Viewport Diameter D Thickness Part Number
DN63CF (4.50" OD) 2.51" N/A 1.28" DS-LL0450
DN63CF (4.50" OD) 2.51" 2.50" 1.28" DS-LL0450VP
DN100CF (6.00" OD) 4.01" N/A 1.42" DS-LL0600
DN100CF (6.00" OD) 4.01" 4.00" 1.42" DS-LL0600VP
DN160CF (8.00" OD) 6.02" N/A 1.41" DS-LL0800
DN160CF (8.00" OD) 6.02" 6.00" 1.42" DS-LL0800VP
DN200CF (10.00" OD) 8.02" N/A 1.72" DS-LL1000
DN200CF (10.00" OD) 8.02" 6.00" 1.72" DS-LL1000VP
DN250CF (12.00" OD) 10.02" N/A 1.78" DS-LL1200
DN250CF (12.00" OD) 10.02" 6.00" 1.78" DS-LL1200VP
DN275CF (13.25" OD) 10.02" N/A 1.83" DS-LL1325
DN275CF (13.25" OD) 10.02" 6.00" 1.83" DS-LL1325VP
DN295CF (14.00" OD) 11.47" N/A 1.83" DS-LL1400
DN295CF (14.00" OD) 11.47" 6.00" 1.83" DS-LL1400VP

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FAQ

Tube fittings are designed for tubes (measured by outside diameter and wall thickness) used in high-pressure and instrumentation applications, whereas pipe fittings are for pipes (identified by nominal pipe size) primarily used in fluid transport.

 

Common valve types include ball valves, gate valves, check valves, butterfly valves, and globe valves. Each serves a specific function—from quick shutoff (ball/gate valves) to flow regulation (globe valves).

 

  • For tubing, measure the outside diameter; for pipes, refer to the nominal pipe size (using conversion charts if needed). Always match the valve or fitting size to your pipe’s dimensions and flow requirements.

  • Frequently used thread types include NPT (National Pipe Tapered), BSP (British Standard Pipe), and UNC, along with slip-fit options that rely on compression or fusion rather than threads.

Interchangeability depends on manufacturer specifications and certification. Always verify compatibility via manufacturer guides or certified interchangeability charts.

 

  • A coupling is a short, straight fitting used to join two pipes or tubes. It provides a secure, leak-tight connection and can sometimes serve to extend or repair piping runs.

Consider valve type, pressure and temperature ratings, material compatibility with your fluid, actuation method (manual or automatic), and maintenance requirements.

 

  • Valves regulate flow by opening, closing, or partially obstructing the pathway. Their mechanisms (such as the rotation of a ball or the linear movement of a gate) determine the speed and precision of flow control.

  • A flange is a flat, circular component used to connect pipes, valves, or other equipment. Bolted together with gaskets, flanges provide a secure, leak-proof joint that facilitates both assembly and maintenance.

  • Manual valves require physical operation via handles or levers, whereas actuated valves use mechanisms—pneumatic, electric, or hydraulic—to open and close automatically or remotely.

  • Issues include leaks caused by improper installation, over-tightening, degraded seals, material incompatibility, and fatigue from repeated cycling. Regular inspection and proper installation practices help mitigate these problems.

Regular maintenance involves periodic inspections, cleaning or replacing worn seals, ensuring proper torque during installation, and adhering to manufacturer guidelines and local plumbing codes to preserve system integrity.

 

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