Fast-Entry Access Load Lock Doors Hardware & Replacement Parts: Reliable Components for Vacuum Chamber Integrity and Serviceability
TFM offers a full selection of Fast-Entry Access Load Lock Doors Hardware & Replacement Parts engineered to support the smooth operation, maintenance, and sealing performance of vacuum load lock systems. Designed for use in high-vacuum (HV) and ultra-high vacuum (UHV) environments, these components are essential for ensuring reliable system entry without compromising vacuum integrity.
From replacement viewport glass to hinges and knobs, TFM’s precision-engineered parts make it easy to maintain and refurbish fast-entry access doors used in load locks, transfer chambers, or isolation modules.
Key Components of Fast-Entry Access Load Lock Doors Hardware & Replacement Parts:
Replacement Viewport Glass
Available in tempered Pyrex for general vacuum use and fused quartz for high-temperature or optical applications. Each glass insert is precision-cut and compatible with standard viewport mounts.Mounting Bolt Sets
Includes hardware such as counterbored bolt sets (e.g., KJLC®-style), specifically designed for full-clearance installation and maximum aperture access.O-Rings
Wide variety of o-ring sizes and materials including Viton®, Buna-N, and silicone, ensuring proper sealing of door perimeters and viewport frames under vacuum cycling conditions.Hinges and Fasteners
High-strength stainless steel hinges, pins, and fastener kits to maintain mechanical stability and long-term operational integrity of the access mechanism.Knobs and Handles
Ergonomically designed replacement knobs, door handles, and latching hardware to support consistent user access, safe closure, and secure sealing during chamber use.
Applications:
Load lock doors in thin film deposition systems
Transfer chamber access points in semiconductor or optics platforms
HV/UHV testing rigs requiring quick-entry functionality
Replacement parts for legacy or custom vacuum chamber designs
OEM system servicing and chamber refurbishment projects
Whether you’re upgrading worn components or configuring new assemblies, TFM’s Fast-Entry Access Load Lock Doors Hardware & Replacement Parts provide the quality and reliability needed to keep your vacuum systems running smoothly.
For sizing charts, compatibility guidance, or special-order materials, contact our technical support team or consult our vacuum hardware catalog.
Ordering Table
Reference | LL Door Part No. | Part Number | Price |
Replacement O-ring for Viewport Glass | DS-LL0450VP | O-V147 | P.O.R. |
Replacement O-ring for Viewport Glass | DS-LL0600VP | O-V155 | P.O.R. |
Replacement O-ring for Viewport Glass | DS-LL0800VPDS-LL1000VPDS-LL1200VPDS-LL1325VPDS-LL1400VP | O-V163 | P.O.R. |
Replacement O-ring for Door | DS-LL0450DS-LL0450VP | O-V231 | P.O.R. |
Replacement O-ring for Door | DS-LL0600DS-LL0600VP | O-V243 | P.O.R. |
Replacement O-ring for Door | DS-LL0800DS-LL0800VP | O-V258 | P.O.R. |
Replacement O-ring for Door | DS-LL1000DS-LL1000VP | O-V266 | P.O.R. |
Replacement O-ring for Door | DS-LL1200DS-LL1200VPDS-LL1325DS-LL1325VP | O-V274 | P.O.R. |
Replacement O-ring for Door | DS-LL1400DS-LL1400VP | O-V277 | P.O.R. |
Bolt Kit for attaching to Tapped Flanges:(8) 0.75" (19.05mm) Length, 5/16-24 Thread | DS-LL0450,DS-LL0450VP | SBK31224075S4-8 | P.O.R. |
Bolt Kit for attaching to Tapped Flanges:(16) 1.00" (25.40mm) Length, 5/16-24 Thread | DS-LL0600,DS-LL0600VP | SBK31224100S4-16 | P.O.R. |
Bolt Kit for attaching to Tapped Flanges:(20) 1.00" (25.40mm) Length, 5/16-24 Thread | DS-LL0800,DS-LL0800VP | SBK31224100S4-20 | P.O.R. |
Bolt Kit for attaching to Tapped Flanges:(24) 1.00" (25.40mm) Length, 5/16-24 Thread | DS-LL1000,DS-LL1000VP | SBK31224100S4-24 | P.O.R. |
Bolt Kit for attaching to Tapped Flanges:(32) 1.00" (25.40mm) Length, 5/16-24 Thread | DS-LL1200,DS-LL1200VP | SBK31224100S4-32 | P.O.R. |
Bolt Kit for attaching to Tapped Flanges:(30) 1.25" (31.75mm) Length, 3/8-24 Thread | DS-LL1325,DS-LL1325VP,DS-LL1400,DS-LL1400VP | SBK37524125S4-30 | P.O.R. |
Bolt & Nut Set for Attaching to Through Hole Flanges:(16) 1.50" (38.10mm) Length, 5/16-24 Thread | DS-LL0600,DS-LL0600VP | SBS31224150S4-16 | P.O.R. |
Bolt & Nut Set for Attaching to Through Hole Flanges:(8) 1.50" (38.10mm) Length, 5/16-24 Thread | DS-LL0450,DS-LL0450VP | SBS31224150S4-8 | P.O.R. |
Bolt & Nut Set for Attaching to Through Hole Flanges:(20) 1.75" (44.45mm) Length, 5/16-24 Thread | DS-LL0800,DS-LL0800VP | SBS31224175S4-20 | P.O.R. |
Bolt & Nut Set for Attaching to Through Hole Flanges:(24) 2.00" (50.80mm) Length, 5/16-24 Thread | DS-LL1000,DS-LL1000VP | SBS31224200S4-24 | P.O.R. |
Bolt & Nut Set for Attaching to Through Hole Flanges:(32) 2.00" (50.80mm) Length, 5/16-24 Thread | DS-LL1200,DS-LL1200VP | SBS31224200S4-32 | P.O.R. |
Bolt & Nut Set for Attaching to Through Hole Flanges:(30) 2.25" (57.15mm) Length, 3/8-24 Thread | DS-LL1325,DS-LL1325VP,DS-LL1400,DS-LL1400VP | SBS37524225S4-30 | P.O.R. |
Replacement Viewport Glass - Quartz | DS-LL0450VP | VPW31QRT037 | P.O.R. |
Replacement Viewport Glass - Borosilicate | DS-LL0450VP | VPW31TPYR037 | P.O.R. |
Replacement Viewport Glass - Quartz | DS-LL0600VP | VPW45QRT037 | P.O.R. |
Replacement Viewport Glass - Borosilicate | DS-LL0600VP | VPW45TPYR037 | P.O.R. |
Replacement Viewport Glass - Quartz | DS-LL0800VPDS-LL1000VPDS-LL1200VPDS-LL1325VPDS-LL1400VP | VPW65QRT037 | P.O.R. |
Replacement Viewport Glass - Borosilicate | DS-LL0800VPDS-LL1000VPDS-LL1200VPDS-LL1325VPDS-LL1400VP | VPW65TPYR037 | P.O.R. |
Reference | LL Door Part No. | Part Number | Price |
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