Versatile and Cost-Effective Components for HV and UHV Applications
When it comes to high vacuum (HV) and ultra-high vacuum (UHV) systems, reliability and cleanliness are paramount. TFM offers general-purpose components designed to meet these stringent requirements while providing excellent corrosion resistance.
Open Position Design
In their open position, edge-welded bellows and valve seats are retracted from the gas flow path, which enhances gas conductance. This design is particularly beneficial for maintaining optimal system performance.
Temperature Resilience
These components are built to endure intermittent baking at temperatures up to 200°C, with a continuous operation rating of 150°C. This capability significantly contributes to achieving a better ultimate vacuum.
Key Features
- Sealing Technologies: The components include fluorocarbon o-ring seat seals, bellows-sealed shafts, and bonnet seals. For applications requiring higher temperature bakeout and superior ultimate vacuum, copper options are available.
- Ease of Maintenance: Routine repairs can be performed without the need to detach the valve body from the system, streamlining maintenance procedures.
- Pneumatic Operation: For pneumatic models, the design includes spring-to-close operation for valves up to 2 inches. Valves that are 2.5 inches and larger utilize an air-to-open, air-to-close mechanism.
- Accessory Requirements: Note that a solenoid is required for operation (available separately—see accessories for details).
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr 7.520 x 10-9 Torr mbar 1.000 x 10-8 mbar |
| Rates | Leak Rate 2.000 x 10-9 mbar*L/s 1.504 x 10-9 Torr*L/s |
| Temperature | Actuator 80.0 ºC 176 ºFClosed Bake 100 ºC 212 ºFOpen Bake 100 ºC 212 ºF |
| Actuator Type | Pneumatic Single Acting |
| Solenoid Kit Included | No |
| Position Indicators | Yes No |
| Bonnet Seal Type | Fluorocarbon (FKM) Copper |
| Valve Body Material | 304L SS |
| Poppet Material | Fluorocarbon (FKM) |
| Shaft Seal | Welded Bellows |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Part Number |
| ISO63-K (3.74" OD) | Fluorocarbon (FKM) | No | SA0250PVIK |
| ISO100-K (5.12" OD) | Fluorocarbon (FKM) | No | SA0400PVIK |
| ISO160-K (7.09" OD) | Fluorocarbon (FKM) | No | SA0600PVIK |
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