Introduction
KF Flanged Bellows Sealed Angle Valves (Pneumatic) are high-reliability vacuum control components designed for rough, medium, and high-vacuum systems. By combining a compact angle-valve geometry, ISO-KF quick-connect flanges, and a bellows-sealed stem with pneumatic actuation, these valves deliver clean, leak-tight operation with fast and repeatable response. They are widely used in semiconductor tools, laboratory vacuum systems, and industrial process equipment where contamination control and automation are critical.
Detailed Description
Bellows sealed angle valves use a welded metal bellows to isolate the actuator mechanism from the vacuum environment. This design completely eliminates dynamic shaft seals, preventing particle generation and outgassing while ensuring long service life under frequent cycling. The angle configuration allows efficient conductance control and space-saving installation compared with inline valves.
KF (QF) flanges enable quick assembly and disassembly using standard clamps and centering rings, making these valves ideal for modular vacuum systems and equipment that requires regular maintenance or reconfiguration. The pneumatic actuator provides consistent closing force and fast switching, supporting automated process control and remote operation.
Valve bodies are typically manufactured from 304 or 316L stainless steel for excellent corrosion resistance and vacuum compatibility. The bellows is precision-welded from thin stainless steel to provide high flexibility and fatigue resistance. Seat materials are selected to balance sealing performance, durability, and cleanliness, depending on the target vacuum range and process conditions.
Applications
KF Flanged Bellows Sealed Angle Valves (Pneumatic) are commonly used in:
Rough and high-vacuum systems
Semiconductor manufacturing equipment
Thin film deposition systems (PVD, CVD, ALD)
Vacuum pump isolation and foreline control
Laboratory and R&D vacuum setups
Automated vacuum process lines
Leak detection and vacuum diagnostics
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Flange Standard | KF16 / KF25 / KF40 / KF50 | Ensures ISO-KF compatibility |
| Actuation | Pneumatic (single or double acting) | Enables automation and fast response |
| Body Material | 304 / 316L Stainless Steel | Vacuum cleanliness and durability |
| Seal Type | Bellows sealed stem | Eliminates dynamic vacuum leaks |
| Operating Pressure | Atmosphere to high vacuum | Suitable for most KF systems |
| Leak Rate | ≤ 1 × 10⁻⁹ mbar·L/s | Maintains vacuum integrity |
| Cycle Life | ≥ 10⁵ cycles (design-dependent) | Long-term reliability |
Comparison with Related Valve Types
| Valve Type | Key Advantage | Typical Application |
|---|---|---|
| KF Bellows Sealed Angle Valve (Pneumatic) | Clean, automated operation | Semiconductor & research tools |
| KF Manual Angle Valve | Simple and cost-effective | Basic vacuum control |
| Inline Vacuum Valve | Straight-through flow | Limited installation space |
| Gate Valve | High conductance | Large vacuum chambers |
FAQ
| Question | Answer |
|---|---|
| Why use a bellows sealed valve? | It prevents shaft seal wear, particle generation, and outgassing. |
| Are these valves suitable for automation? | Yes, pneumatic actuation supports fully automated systems. |
| What air pressure is required? | Typically 0.4–0.6 MPa (clean, dry compressed air). |
| Can the valve be mounted in any orientation? | Yes, installation orientation is generally flexible. |
| Are custom configurations available? | Yes, special materials, sizes, and actuator options can be supplied. |
Packaging
Our KF Flanged Bellows Sealed Angle Valves (Pneumatic) are thoroughly cleaned, capped, and packaged to prevent contamination. Each valve is securely protected with shock-absorbing materials and clearly labeled to ensure safe transportation and easy identification.
Conclusion
KF Flanged Bellows Sealed Angle Valves (Pneumatic) provide a dependable and contamination-free solution for automated vacuum control. Their bellows-sealed design, quick-connect KF flanges, and robust pneumatic actuation make them ideal for semiconductor, laboratory, and industrial vacuum applications.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr 7.520 x 10-9 Torr mbar 1.000 x 10-8 mbar |
| Rates | Leak Rate 2.000 x 10-9 mbar*L/s 1.504 x 10-9 Torr*L/s |
| Temperature | Actuator 80.0 ºC 176 ºFClosed Bake 100 ºC 212 ºFOpen Bake 100 ºC 212 ºF |
| Actuator Type | Pneumatic Single Acting |
| Solenoid Kit Included | No |
| Position Indicators | No |
| Bonnet Seal Type | Fluorocarbon (FKM) |
| Valve Body Material | 304L SS |
| Poppet Material | Fluorocarbon (FKM) |
| Shaft Seal | Welded Bellows |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Part Number |
| KF16 (1.18" OD) | Fluorocarbon (FKM) | No | SA0075PVQF |
| KF25 (1.57" OD) | Fluorocarbon (FKM) | No | SA0100PVQF |
| KF40 (2.16" OD) | Fluorocarbon (FKM) | No | SA0150PVQF |
| KF50 (2.95" OD) | Fluorocarbon (FKM) | No | SA0200PVQ |
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