KF Flanged TFM Auto-Soft Start Valve (Flow Actuated)

KF Flanged TFM Auto-Soft Start Valve (Flow Actuated)

This valve serves as a replacement for a KF centering ring, simplifying installation and effectively managing the throttling of roughing pumps during their initial evacuation. As the roughing pump starts, the initial flow causes the vane assembly to close, automatically throttling the pump. The valve then opens automatically once a predetermined pressure differential is achieved.

Features

• Durable Construction: Made from 304 stainless steel with an Elgiloy® spring for enhanced longevity.
• High-Temperature Resistance: Maximum operating temperature of 100°C.
• Reduced Turbulence: Minimizes turbulence in the system by lowering the initial pumping speed, which is crucial for sensitive applications.
• Particle Sensitivity: Ideal for environments where particle disruption is critical, such as semiconductor and thin film processes.
• Vent Valve Compatibility: Can be used with vent valves to prevent extreme pressure differentials and reduce turbulence during system venting.
• Substrate Protection: Helps prevent damage to substrates during operation.
• Cost-Effective Solution: Replaces costly pressure control bypass valves, offering an efficient alternative.
• Rapid Vane Closure: Achieves fast action with a closing time of 12 ms or better during testing.
• No Electrical Power Required: Operates independently of electrical systems, ensuring reliability.

Note: Using the soft start check valve can increase typical pump-down time by 3X. Test times are based on a 27 CFM pump evacuating a 100-liter volume, with results varying by system configuration.

Specifications Table

Ordering Table