Valves for Semiconductor and Processing Applications
Valves are crucial in semiconductor and other processing environments, primarily used to isolate pumps and sample entry locks from high vacuum (HV) or ultra-high vacuum (UHV) work chambers.
Features:
- Flange Types: Available in KF, ISO, and ASA/ANSI Flanged configurations, operating effectively in the atmosphere to the 10⁻⁹ torr pressure range, and bakeable up to 150°C (in the open position).
- Material: Made of general-purpose electropolished stainless steel.
- Brazing: Vacuum brazed at 1,100°C to ensure reliable operation under HV and UHV conditions.
- Design: Compact design offering high conductance.
- Operation: Shock-free with minimal vibration, rated for 100,000 cycles before maintenance is required.
- Operation Type: Available in both manual and pneumatic options.
- Safety: Pneumatic valves automatically close or remain closed during power loss or air pressure loss.
- Indication: Models with a 1.5″ flange O.D. and larger feature magnetic REED switches for position indication.
- Solenoid Operator: Pneumatic valves come with a 120VAC solenoid operator at no extra charge, with options for other AC and DC voltages available upon request.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 7.501 x 10-10 Torr Max: 760 Torrmbar Min: 1.000 x 10-9 mbar Max: 1013 mbar |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator 60.0 ºC 140 ºFBakeable 150 ºC 302 ºF |
| Shaft Seal Material | Bellows Sealed |
| Cycle Life | 100,000 |
| Actuator Type | Pneumatic Double Acting |
| Solenoid Kit Included | No Yes |
| Max Differential Pressure Before Open | 22.5 Torr |
| Bonnet Seal Type | Fluorocarbon (FKM) |
| Valve Body Material | Stainless Steel |
| Valve Seal Material | Fluorocarbon (FKM) |
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Thread | Part Number |
| KF16 (1.18" OD) | Fluorocarbon (FKM) | Yes | N/A | SG0063PVQF |
| KF40 (2.16" OD) | Fluorocarbon (FKM) | Yes | N/A | SG0150PVQF |
| KF50 (2.95" OD) | Fluorocarbon (FKM) | Yes | N/A | SG0200PVQF |
| ISO63-F (5.12" OD) | Fluorocarbon (FKM) | Yes | M8 | SG0250PVIF |
| ISO63-K (3.74" OD) | Fluorocarbon (FKM) | Yes | N/A | SG0250PVIK |
| ISO80-F (5.71" OD) | Fluorocarbon (FKM) | Yes | M8 | SG0300PVIF |
| ISO80-K (4.33" OD) | Fluorocarbon (FKM) | Yes | N/A | SG0300PVIK |
| ISO100-F (6.50" OD) | Fluorocarbon (FKM) | Yes | M8 | SG0400PVIF |
| ISO100-K (5.12" OD) | Fluorocarbon (FKM) | Yes | N/A | SG0400PVIK |
| ISO160-F (8.86" OD) | Fluorocarbon (FKM) | Yes | M10 | SG0600PVIF |
| ISO160-K (7.09" OD) | Fluorocarbon (FKM) | Yes | N/A | SG0600PVIK |
| ISO200-F (11.22" OD) | Fluorocarbon (FKM) | Yes | M10 | SG0800PVIF |
| ISO200-K (9.45" OD) | Fluorocarbon (FKM) | Yes | N/A | SG0800PVIK |
| ISO250-F (13.19" OD) | Fluorocarbon (FKM) | Yes | M10 | SG1000PVIF |
| ISO250-K (11.42" OD) | Fluorocarbon (FKM) | Yes | N/A | SG1000PVIK |
| ISO320-F (16.73" OD) | Fluorocarbon (FKM) | Yes | M12 | SG1200PVIF |
| ISO320-K (14.57" OD) | Fluorocarbon (FKM) | Yes | N/A | SG1200PVIK |
Reviews
There are no reviews yet.