Product Overview
Li0.38La0.56TiO3 Sputtering Target (LLTO) is a composition-specific sputtering target for thin-film deposition and PVD process development. The practical specification normally includes chemistry, purity, dimensions, density, target configuration, and any bonding or backing requirement needed by the sputtering cathode.
Material and Deposition Characteristics
Power mode and process conditions should be selected according to the target conductivity, thermal behavior, and the requirements of the cathode system. For less common materials, conservative initial power density and film-composition verification are good practice.
Technical Data
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Composition | Li₀.₃₈La₀.₅₆TiO₃ | High Li-ion conductivity |
| Purity | 99.9% (3N) | Ensures stable sputtering and film quality |
| Density | ≥ 95% theoretical | Promotes uniform sputtering |
| Diameter | 25 – 100 mm (customizable) | Compatible with standard sputtering systems |
| Thickness | 3 – 6 mm | Controls sputtering duration and stability |
| Bonding | Copper backing plate (In-bonded or elastomer) | Enhances thermal conductivity |
| Crystal Structure | Perovskite | Enables ionic mobility |
| Material | Key Advantage | Typical Application |
|---|---|---|
| Li₀.₃₈La₀.₅₆TiO₃ | High ionic conductivity and thermal stability | Solid-state electrolytes |
| Li₇La₃Zr₂O₁₂ (LLZO) | Wider electrochemical window | Li-metal battery electrolyte |
| Li₃PO₄ | Excellent chemical stability | Thin-film lithium batteries |
| Al₂O₃ | High dielectric strength | Protective or insulating layers |
| Question | Answer |
|---|---|
| Can the target be customized? | Yes, dimensions, purity, and bonding type can be tailored to your sputtering system. |
| What backing plate options are available? | Typically copper or titanium, bonded with indium or elastomer. |
| How is the target packaged? | Vacuum-sealed with protective foam in export-safe cartons or wooden crates. |
| What sputtering methods are compatible? | Suitable for RF and DC magnetron sputtering systems. |
| What industries use this target most? | Battery research, microelectronics, and materials science. |
Typical Thin-Film Applications
- Thin-film research and materials-development projects requiring a composition-specific sputtering source
- Semiconductor, optical, energy, electronic, or laboratory coatings depending on the material system
- Custom R&D work where target composition, purity, and geometry need to be specified together
Target Configuration and Ordering Considerations
For quotation and manufacturability review, provide target size, thickness, purity or alloy composition, quantity, and the sputtering gun or cathode model if known. If a bonded assembly is required, include backing-plate material, bonding preference, and any dimensional tolerances, surface-finish needs, or inspection-document requirements. TFM can also review customer drawings or old-target samples for replacement builds.
Frequently Asked Questions
What is the main reason to use a Li0.38La0.56TiO3 sputtering target?
It provides a composition-specific source for thin-film deposition when the target material itself is important to the desired film chemistry or process.
How should the sputtering mode for Li0.38La0.56TiO3 be selected?
The power mode should be chosen according to target conductivity, thermal behavior, and equipment capability. Less-conductive materials are commonly evaluated with RF power.
Why are density and microstructure important for Li0.38La0.56TiO3 targets?
These factors can influence erosion stability, thermal behavior, particle generation, and the risk of cracking or local hot spots.
Can Li0.38La0.56TiO3 be supplied with a backing plate?
Yes. If the material is brittle or the cathode requires it, a bonded configuration can be reviewed according to target size, thickness, cooling, and power.
Does target composition always equal film composition?
No. Film chemistry may differ because of sputtering yields, process conditions, substrate temperature, re-sputtering, and chamber history. Film verification is recommended when composition matters.
What should I provide to request a quotation for Li0.38La0.56TiO3?
Please provide the composition, purity, dimensions, quantity, target configuration, cathode details, and any drawing or inspection requirements.
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