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Manual SS All-Metal Angle Valves (CF Flanged)

Manual Stainless Steel All-Metal Angle Valves (CF Flanged)

This series of TFM manual stainless steel all-metal angle valves is specifically designed for ultra-high vacuum (UHV) and cryogenic applications, where extreme temperature fluctuations prevent the use of elastomer seal valves.

Key Features

  • Approved for Beam Line Facilities: Suitable for use in beam line applications.
  • Wide Temperature Operating Range: Functions effectively between 450°C and -250°C.
  • Durable Seal Design: Maximum temperature bakeouts may necessitate poppet seal replacement after 50 cycles, while hundreds of cycles are possible with moderate bakeouts. A dial indicator on top of the valve indicates the correct torque for closure and when the seal needs replacement.

Additional Specifications

  • Operable at cryogenic temperatures.
  • Vacuum rated to below 10⁻¹¹ torr.
  • Constructed entirely of stainless steel.
  • Electropolished both inside and out for enhanced cleanliness and performance.
  • Features extended-life stainless steel bellows.
  • Easily replaceable copper poppet seal.
  • Pulled port bodies provide higher conductance.
  • Assembled in a clean room environment.
  • Leak rate of 10⁻¹¹ standard cc/sec or less.
  • Available with 1-1/3″, 2-3/4″, and 4-1/2″ O.D. CF flanges.
  • Equipped with a dial indicator for proper closure.

Seal Replacement Procedure

The poppet seal can be easily replaced with a slotted screwdriver. After replacing the seal, the valve must be torqued to a higher value than during normal operation to ensure proper seating. After closing the valve to its standard torque value, loosen the set screw beneath the closure nut, rotate the indicator to the furthest counter-clockwise line on top of the valve, and retighten the set screw. This mark can be used for nearly indefinite closure.

Periodic checks with a torque wrench will help identify seat wear and determine the proper alignment mark. When the indicator reaches the last mark, seal replacement is recommended. Be sure not to exceed the maximum torque specifications.

 

Specifications Table

ManufacturerTFM
PressureTorr
1.000 x 10-11 Torr
mbar
7.500 x 10-12 mbar
RatesHelium Leak Rate
1.000 x 10-10 mbar*L/s
7.520 x 10-11 Torr*L/s
TemperatureBakeable Closed
300 ºC
572 ºFBakeable Open
450 ºC
842 ºF
Cycle
Life
10,000
Bonnet
Seal Type
Copper
Valve Body
Material
304L SS
Valve Seal
Material
Copper

Ordering Table

New wpDataTable

Drawing Flange Size Bonnet Seal Type Note Part Number
Tooltip DN16CF (1.33" OD) Copper 1 VZCR20R
Tooltip DN35CF-DN40CF (2.75" OD) Copper VZCR40R

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FAQ

Sputtering targets are materials used in thin-film deposition processes to create coatings on substrates. They are used in industries like semiconductors, optics, photovoltaics, and electronics.

Evaporation materials are used in Physical Vapor Deposition (PVD) processes, where materials are heated and evaporated to form a thin film on a substrate. These are critical for applications in optics, wear protection, and decorative coatings.

Boat crucibles are used as containers for evaporation materials during PVD processes. They help to uniformly evaporate materials onto the substrate for thin film formation.

Sputtering uses energetic particles to eject material from a target, while evaporation involves heating a material until it vaporizes and deposits on a substrate. Both are common methods in Physical Vapor Deposition (PVD) for creating thin films.

Consider the material composition, purity, target size, and application-specific requirements such as the thickness and uniformity of the film.

Yes, we offer customized sputtering targets, evaporation materials, and crucibles to meet specific customer requirements for size, material composition, and purity.

Yes, we can assist in selecting the most suitable material based on your application, whether it’s for optical coatings, semiconductor fabrication, or decorative finishes.

Yes, we offer both bulk and small quantities of sputtering targets, evaporation materials, and spherical powders to support research, prototyping, and development projects.

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